Results 211 to 220 of about 18,262 (225)
Some of the next articles are maybe not open access.

Application of SR-excited etching to microfabrication

Optics & Laser Technology, 1994
Shingo Terakado, Shigeo Suzuki
openaire   +1 more source

Advances in glass Microfabrication Femtosecond laser irradiation followed by chemical etching

2012
Femtosecond laser irradiation followed by chemical etching (F.L.I.C.E.) is an emerging technique for the fabrication of directly buried, three-dimensional microfluidic channels in silica. The procedure attested in literature, which has been widely studied in the past years, consists of irradiating a glass slab and subsequently apply a chemical etching ...
Venturini   +9 more
openaire   +2 more sources

Chemically Assisted Ion Beam Etching for Silicon‐Based Microfabrication

Journal of The Electrochemical Society, 1994
Y. S. Chieh, J. P. Krusius, P. Chapman
openaire   +1 more source

Microfabrication by Laser Lithography Combined with Ion Etching

2018
Zhiyu Zhang, Ruoqiu Wang, Donglin Xue
openaire   +1 more source

Microfabrication meets microbiology

Nature Reviews Microbiology, 2007
George M Whitesides
exaly  

Focused, Nanoscale Electron-Beam-Induced Deposition and Etching

Critical Reviews in Solid State and Materials Sciences, 2006
Jason D Fowlkes
exaly  

Microfabrication techniques for chemical/biosensors

Proceedings of the IEEE, 2003
Oliver Brand
exaly  

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