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Application of SR-excited etching to microfabrication
Optics & Laser Technology, 1994Shingo Terakado, Shigeo Suzuki
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Advances in glass Microfabrication Femtosecond laser irradiation followed by chemical etching
2012Femtosecond laser irradiation followed by chemical etching (F.L.I.C.E.) is an emerging technique for the fabrication of directly buried, three-dimensional microfluidic channels in silica. The procedure attested in literature, which has been widely studied in the past years, consists of irradiating a glass slab and subsequently apply a chemical etching ...
Venturini +9 more
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Chemically Assisted Ion Beam Etching for SiliconāBased Microfabrication
Journal of The Electrochemical Society, 1994Y. S. Chieh, J. P. Krusius, P. Chapman
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Microfabrication by localized electrodeposition and etching
Metal Finishing, 1998openaire +1 more source
Microfabrication by Laser Lithography Combined with Ion Etching
2018Zhiyu Zhang, Ruoqiu Wang, Donglin Xue
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Focused, Nanoscale Electron-Beam-Induced Deposition and Etching
Critical Reviews in Solid State and Materials Sciences, 2006Jason D Fowlkes
exaly

