Results 41 to 50 of about 189,870 (274)
SF6 Optimized O2 Plasma Etching of Parylene C
Micromachines, 2018 Parylene C is a widely used polymer material in microfabrication because of its excellent properties such as chemical inertness, biocompatibility and flexibility.
Lingqian Zhang +3 more
doaj +1 more source
Two-step hybrid process of movable part inside glass substrate using ultrafast laser
Micro and Nano Systems Letters, 2021 We demonstrate a two-step hybrid process for fabricating movable parts inside glass substrate using the selective laser-induced etching (SLE) process that is consisted of laser-direct writing and wet chemical etching.
Jeongtae Kim +4 more
doaj +1 more source
Fabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-8
Micromachines, 2021 For several decades, microelectrode array (MEA) has been a powerful tool for in vitro neural electrophysiology because it provides a unique approach for monitoring the activity of a number of neurons over time.
Hee Soo Jeong +3 more
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Effects of Surface Microtopography on Wettability of Poly(dimethylsiloxane) Film: Superhydrophobicity [PDF]
علوم و تکنولوژی پلیمر, 2020 Hypothesis: Recent advances in micro- and nanotechnology have led to possible design of functional micro/nanostructured surfaces with micro/nanotopography features that can exhibit low adhesion properties.
Shayesteh Khakvand +3 more
doaj +1 more source
Microfabrication Approaches on Magnetic Shape Memory Films
Advanced Engineering Materials, 2023 Magnetic shape memory alloys are emerging multifunctional materials that enable applications like high‐stroke actuation, solid‐state refrigeration, and energy harvesting of waste heat.
S. Kar, K. Nielsch, S. Fähler, H. Reith
semanticscholar +1 more source
In vivo measurements with robust silicon-based multielectrode arrays with extreme shaft lengths [PDF]
, 2013 In this paper, manufacturing and in vivo testing of extreme-long Si-based neural microelectrode arrays are presented. Probes with different shaft lengths (15–70 mm) are formed by deep reactive ion etching and have been equipped with platinum electrodes ...
Baracskay, Péter +7 more
core +1 more source
Materials Research Letters, 2018 Etching rate is a major concern for the effective mass production of high-aspect-ratio microstructures, especially in p-type silicon. In this work, controlled electrochemical growth of high-aspect-ratio (from 15 to 110) macropores in p-type silicon at ...
Daohan Ge +8 more
doaj +1 more source
Microsystems & Nanoengineering, 2021 A microneedle (MN) array is a novel biomedical device adopted in medical applications to pierce through the stratum corneum while targeting the viable epidermis and dermis layers of the skin.
Libo Wu +3 more
doaj +1 more source
THz Metamaterial Characterization Using THz-TDS [PDF]
, 2017 The purpose of this chapter is to familiarize the reader with metamaterials and describe terahertz (THz) spectroscopy within metamaterials research. The introduction provides key background information on metamaterials, describes their history and their ...
Coutu, Ronald A., Jr. +1 more
core +4 more sources
Isolation of III-V/Ge Multijunction Solar Cells by Wet Etching
International Journal of Photoenergy, 2013 Microfabrication cycles of III-V multijunction solar cells include several technological steps and end with a wafer dicing step to separate individual cells.
A. Turala +5 more
doaj +1 more source