Design of experiment for the optimisation of deep reactive ion etching of silicon inserts for micro-fabrication [PDF]
, 2012 The following paper describes a design of experiments investigation of the deep reactive of pillar structures on a silicon wafer. The etched wafers would subsequently be used as masters for the fabrication of nickel mould inserts for microinjection ...
Alcock, Jeffrey R. +2 more
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Detachable three-layer Au absorber microfabrication for low-temperature detectors
Micro and Nano Engineering, 2023 Low temperature detectors (LTDs) used for decay energy spectrometry (DES) can provide accurate and reliable decay data thanks to their high-energy resolution and a near 100% detection efficiency for the radiations of interest. However, it is essential to
Jawad Hadid +7 more
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Lithographic band gap tuning in photonic band gap crystals [PDF]
, 1996 We describe the lithographic control over the spectral response of three-dimensional photonic crystals. By precise microfabrication of the geometry using a reproducible and reliable procedure consisting of electron beam lithography followed by dry ...
Arbet-Engels, V. +3 more
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SF6 Optimized O2 Plasma Etching of Parylene C
Micromachines, 2018 Parylene C is a widely used polymer material in microfabrication because of its excellent properties such as chemical inertness, biocompatibility and flexibility.
Lingqian Zhang +3 more
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Two-step hybrid process of movable part inside glass substrate using ultrafast laser
Micro and Nano Systems Letters, 2021 We demonstrate a two-step hybrid process for fabricating movable parts inside glass substrate using the selective laser-induced etching (SLE) process that is consisted of laser-direct writing and wet chemical etching.
Jeongtae Kim +4 more
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Fabrication of Planar Microelectrode Array Using Laser-Patterned ITO and SU-8
Micromachines, 2021 For several decades, microelectrode array (MEA) has been a powerful tool for in vitro neural electrophysiology because it provides a unique approach for monitoring the activity of a number of neurons over time.
Hee Soo Jeong +3 more
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Effects of Surface Microtopography on Wettability of Poly(dimethylsiloxane) Film: Superhydrophobicity [PDF]
علوم و تکنولوژی پلیمر, 2020 Hypothesis: Recent advances in micro- and nanotechnology have led to possible design of functional micro/nanostructured surfaces with micro/nanotopography features that can exhibit low adhesion properties.
Shayesteh Khakvand +3 more
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Three-dimensional microstructuring of yttrium aluminum garnet crystals for laser active optofluidic applications [PDF]
, 2013 The following article appeared in Applied Physics Letters 103.4 (2013): 041101 and may be found at http://scitation.aip.org/content/aip/journal/apl/103/4/10.1063/1.4816338We demonstrate three-dimensional microstructuring in a neodymium doped yttrium ...
Choudhury, Debaditya +5 more
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Sensors, 2022 We propose a hybrid laser microfabrication approach for the manufacture of three-dimensional (3D) optofluidic spot-size converters in fused silica glass by a combination of femtosecond (fs) laser microfabrication and carbon dioxide laser irradiation ...
Jianping Yu +9 more
doaj +1 more source
Integrated movable micromechanical structures for sensors and actuators [PDF]
, 1988 Movable pin-joints, gears, springs, cranks, and slider structures with dimensions measured in micrometers have been fabricated using silicon microfabrication technology.
Fan, Long-Sheng +2 more
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