Results 11 to 20 of about 118,840 (195)

Experimental investigation on anisotropic surface properties of crystalline silicon

Bibechana, 2012
Anisotropic etching of silicon has been studied by wet potassium hydroxide (KOH) etchant with its variation of temperature and concentration. Results presented here are temperature dependent etch rate along the crystallographic orientations. The etching
Shobha Kanta Lamichhane
doaj   +3 more sources

Dry etching and sputtering [PDF]

, 2003
Dry etching is an important process for micro- and nanofabrication. Sputtering effects can arise in two contexts within a dry-etch process. Incoming ions cause removal of volatile products that arise from the interaction between the dry-etch plasma and ...
Wilkinson, C.D.W., Rahman, M., M. Rahman, C. D. W. Wilkinson   +3 more
core   +2 more sources

Lithography and Etching‐Free Microfabrication of Silicon Carbide on Insulator Using Direct UV Laser Ablation [PDF]

, 2020
Silicon carbide (SiC)-based microsystems are promising alternatives for silicon-based counterparts in a wide range of applications aiming at conditions of high temperature, high corrosion, and extreme vibration/shock.
Nguyen, Nam-Trung, Dzung, Viet Dao, Dowling, Karen M., Chapin, Caitlin A., Debbie G. Senesky, Karen M. Dowling, Ananth Saran Yalamarthy, Dinh, Toan, Nam-Trung, Nguyen, Tuan‐Khoa Nguyen, Chapin, Caitlin A, Quoc-Dung, Truong, Hoang-Phuong, Phan, Hoang-Phuong Phan, Phan, Hoang-Phuong, Quoc-Dung Truong, Tuan-Khoa, Nguyen, Dau, Van Thanh, Goodson, Kenneth E., Toan Dinh, Caitlin A. Chapin, Liu, Tanya, Balakrishnan, Vivekananthan, Toan, Dinh, Vivekananthan Balakrishnan, Nam-Trung Nguyen, Van, Thanh Dau, Nguyen, Tuan-Khoa, Yalamarthy, Ananth Saran, Truong, Quoc-Dung, Senesky, Debbie G, Van Thanh Dau, Dao, Dzung Viet, Tanya Liu, Dzung Viet Dao, Kenneth E. Goodson, Dowling, Karen M, Goodson, Kenneth E, Senesky, Debbie G.   +38 more
core   +1 more source

In Situ Agarose Microfabrication Technology Using Joule Heating of Micro Ionic Current for On-Chip Cell Network Analysis

Micromachines, 2022
Agarose microfabrication technology is one of the micropatterning techniques of cells having advantages of simple and flexible real-time fabrication of three-dimensional confinement microstructures even during cell cultivation.
Kenji Shimoda, Haruki Watanabe, Yoshitsune Hondo, Mitsuru Sentoku, Kazufumi Sakamoto, Kenji Yasuda   +5 more
doaj   +1 more source

Etching-Assisted Ablation of the UV-Transparent Fluoropolymer CYTOP Using Various Laser Pulse Widths and Subsequent Microfluidic Applications

Micromachines, 2018
This work demonstrated the surface microfabrication of the UV-transparent fluoropolymer CYTOP (perfluoro 1-butenyl vinyl ether), by etching-assisted ablation using lasers with different pulse widths.
Keisuke Nemoto, Yasutaka Hanada
doaj   +1 more source

Femtosecond-Laser-Induced All-Silicon Dielectric Metasurfaces Assisted by Wet Chemical Etching

Ultrafast Science, 2023
All-dielectric metasurfaces offer low material loss and strong field localization and are, therefore, well suited for ultrathin and compact optical devices for electomagnetic wave manipulation at the nanoscale.
Ioanna Sakellari, Sotiris Droulias, Andreas Lemonis, Emmanuel I. Stratakis   +3 more
doaj   +1 more source

Gold etching for microfabrication [PDF]

The etching of gold is a key enabling technology in the fabrication of many microdevices and is widely used in the electronic, optoelectronic and microelectromechanical systems (MEMS) industries.
Green TA
core   +4 more sources

Anisotropic pyrochemical dry etching of fluorinated ethylene propylene induced by pre-irradiation with synchrotron radiation

AIP Advances, 2021
Anisotropic pyrochemical micro-etching induced by synchrotron x-ray irradiation is developed as a microfabrication process for fluorinated ethylene propylene (FEP). X-ray irradiation is performed at room temperature, and the irradiation area is etched by
Kaito Fujitani, Masaya Takeuchi, Yuichi Haruyama, Akinobu Yamaguchi, Yuichi Utsumi   +4 more
doaj   +1 more source

On-Chip Glucose Detection Based on Glucose Oxidase Immobilized on a Platinum-Modified, Gold Microband Electrode

Biosensors, 2021
We report the microfabrication and characterization of gold microband electrodes on silicon using standard microfabrication methods, i.e., lithography and etching techniques. A two-step electrodeposition process was carried out using the on-chip platinum
Julia Madden, Colm Barrett, Fathima R. Laffir, Michael Thompson, Paul Galvin, Alan O’ Riordan   +5 more
doaj   +1 more source

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

Micromachines, 2022
We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex ...
Aodong Zhang, Jian Xu, Yucen Li, Ming Hu, Zijie Lin, Yunpeng Song, Jia Qi, Wei Chen, Zhaoxiang Liu, Ya Cheng   +9 more
doaj   +1 more source