Results 11 to 20 of about 18,262 (225)

Gold etching for microfabrication [PDF]

Gold Bulletin, 2014
The etching of gold is a key enabling technology in the fabrication of many microdevices and is widely used in the electronic, optoelectronic and microelectromechanical systems (MEMS) industries. In this review, we examine some of the available methods for patterning gold thin films using dry and wet etching techniques.
Todd Green
openaire   +5 more sources

High‐Aspect‐Ratio Grating Microfabrication by Platinum‐Assisted Chemical Etching and Gold Electroplating [PDF]

Advanced Engineering Materials, 2020
Diffractive optics play a key role in hard X‐rays imaging for which many scientific, technological, and biomedical applications exist. Herein, high‐aspect‐ratio microfabrication of gratings for X‐ray interferometry is demonstrated using Pt as a catalyst for the metal assisted chemical etching of Si in a solution of HF and H2O2.
Romano L., Vila-Comamala J., Jefimovs K., Stampanoni M.   +3 more
openaire   +5 more sources

Femtosecond-Laser-Induced All-Silicon Dielectric Metasurfaces Assisted by Wet Chemical Etching

Ultrafast Science, 2023
All-dielectric metasurfaces offer low material loss and strong field localization and are, therefore, well suited for ultrathin and compact optical devices for electomagnetic wave manipulation at the nanoscale.
Ioanna Sakellari, Sotiris Droulias, Andreas Lemonis, Emmanuel I. Stratakis   +3 more
doaj   +1 more source

Silicon micromachined hollow microneedles for transdermal liquid transfer [PDF]

, 2002
This paper presents an improved design and fabrication process [ 13 for hollow micro needles with the proper mechanical strength and sharpness to be applied for painless transdermal transfer of liquids.
Berenschot, J.W., Berg, A. van den, Boer, M.J. de, Gardeniers, J.G.E., Hefetz, M., Oever, R. van 't, Yeshurun, Y.   +6 more
core   +7 more sources

Etching-Assisted Ablation of the UV-Transparent Fluoropolymer CYTOP Using Various Laser Pulse Widths and Subsequent Microfluidic Applications

Micromachines, 2018
This work demonstrated the surface microfabrication of the UV-transparent fluoropolymer CYTOP (perfluoro 1-butenyl vinyl ether), by etching-assisted ablation using lasers with different pulse widths.
Keisuke Nemoto, Yasutaka Hanada
doaj   +1 more source

On-Chip Glucose Detection Based on Glucose Oxidase Immobilized on a Platinum-Modified, Gold Microband Electrode

Biosensors, 2021
We report the microfabrication and characterization of gold microband electrodes on silicon using standard microfabrication methods, i.e., lithography and etching techniques. A two-step electrodeposition process was carried out using the on-chip platinum
Julia Madden, Colm Barrett, Fathima R. Laffir, Michael Thompson, Paul Galvin, Alan O’ Riordan   +5 more
doaj   +1 more source

Microfabrication of palladium-silver alloy membranes for hydrogen separation [PDF]

, 2003
In this paper, a process for the microfabrication of a wafer-scale palladium-silver alloy membrane (Pd-Ag) is presented. Pd-Ag alloy films containing 23 wt% Ag were prepared by co-sputtering from pure Pd and Ag targets.
Berenschot, Johan W., de Boer, Meint J., Elwenspoek, Michael Curt, Gardeniers, Johannes G.E., Gielens, F.C. (Frank), Jansen, Henricus V., Nijdam, A.J., Nijdam, W., Tong, D.H., van Rijn, C.J.M., Wensink, H.   +10 more
core   +2 more sources

Anisotropic pyrochemical dry etching of fluorinated ethylene propylene induced by pre-irradiation with synchrotron radiation

AIP Advances, 2021
Anisotropic pyrochemical micro-etching induced by synchrotron x-ray irradiation is developed as a microfabrication process for fluorinated ethylene propylene (FEP). X-ray irradiation is performed at room temperature, and the irradiation area is etched by
Kaito Fujitani, Masaya Takeuchi, Yuichi Haruyama, Akinobu Yamaguchi, Yuichi Utsumi   +4 more
doaj   +1 more source

Microfabrication of Laser-Driven Accelerator Structures [PDF]

, 2002
We discuss the potential for using microfabrication techniques for laser-driven accelerator construction. We introduce microfabrication processes in general, and then describe our investigation of a particular trial process.
Cowan, Benjamin
core   +2 more sources

Three-Dimensional Large-Scale Fused Silica Microfluidic Chips Enabled by Hybrid Laser Microfabrication for Continuous-Flow UV Photochemical Synthesis

Micromachines, 2022
We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in situ melting for centimeter-scale and bonding-free fabrication of 3D complex ...
Aodong Zhang, Jian Xu, Yucen Li, Ming Hu, Zijie Lin, Yunpeng Song, Jia Qi, Wei Chen, Zhaoxiang Liu, Ya Cheng   +9 more
doaj   +1 more source