Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication [PDF]
Micromachines, 2021 This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro- and nanofabrication has become a very important enabling technology ...
Michael Huff
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Damage-Free Vertical Microfabrication of α-Quartz via HF Gas-Phase Catalyst Etching. [PDF]
ACS Appl Mater InterfacesSano KH +6 more
europepmc +5 more sources
Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review [PDF]
Micromachines, 2020 High-aspect-ratio silicon micro- and nanostructures are technologically relevant in several applications, such as microelectronics, microelectromechanical systems, sensors, thermoelectric materials, battery anodes, solar cells, photonic devices, and X ...
Lucia Romano, Marco Stampanoni
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Nano-Micro Letters, 2021 Nanomaterials are known to exhibit a number of interesting physical and chemical properties for various applications, including energy conversion and storage, nanoscale electronics, sensors and actuators, photonics devices and even for biomedical ...
Lili Zhao +8 more
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AI-driven feature recognition of SEM profiles in deep reactive ion etching based on physics-constrained variational autoencoder [PDF]
Microsystems & NanoengineeringDeep reactive ion etching (DRIE) is critical for fabricating high-aspect-ratio structures in microelectromechanical systems (MEMS), yet its complex, parameter-dependent process poses significant optimization challenges.
Fang Wang +6 more
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Selective laser etching fabrication of stacked microporous membranes for multisize particle separation in 3D microfluidics [PDF]
Scientific ReportsGlass substrates are widely utilized in microfluidic applications due to their exceptional properties, including optical transparency, biocompatibility, chemical and thermal stability, and compatibility with standard microfabrication techniques.
Diego Duran-Arteaga +3 more
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Fabrication and application of 3D Terahertz metamaterials with vertical multinanogaps for spectroscopic sensing [PDF]
Scientific ReportsTerahertz (THz) metamaterials have garnered attention for their unique electromagnetic properties and potential applications in biomaterial sensing, offering label-free, non-contact capabilities. However, their performance is limited by their diffraction
Naoki Inomata +4 more
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Bio–Microfabrication of 2D and 3D Biomimetic Gut-on-a-Chip
Micromachines, 2023 Traditional goal of microfabrication was to limitedly construct nano- and micro-geometries on silicon or quartz wafers using various semiconductor manufacturing technologies, such as photolithography, soft lithography, etching, deposition, and so on ...
Yeongseok Jang, Jinmu Jung, Jonghyun Oh
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Experimental investigation on anisotropic surface properties of crystalline silicon
Bibechana, 2012 Anisotropic etching of silicon has been studied by wet potassium hydroxide (KOH) etchant with its variation of temperature and concentration. Results presented here are temperature dependent etch rate along the crystallographic orientations. The etching
Shobha Kanta Lamichhane
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Micromachines, 2022 Agarose microfabrication technology is one of the micropatterning techniques of cells having advantages of simple and flexible real-time fabrication of three-dimensional confinement microstructures even during cell cultivation.
Kenji Shimoda +5 more
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