Microfabrication Strategies for Silicon Anodes in On-Chip and Miniaturized Batteries [PDF]
MicromachinesThe rapid expansion of autonomous microsystems, implantable sensors, wireless sensor nodes, Internet-of-Things devices, distributed electronics, and heterogeneous system-on-chip platforms has intensified the demand for compact electrochemical energy ...
Heonsu Park, Churl Seung Lee, Joonho Bae
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Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication
Micromachines, 2021 This paper reviews the recent advances in reaction-ion etching (RIE) for application in high-aspect-ratio microfabrication. High-aspect-ratio etching of materials used in micro- and nanofabrication has become a very important enabling technology ...
Michael Huff
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AI-driven feature recognition of SEM profiles in deep reactive ion etching based on physics-constrained variational autoencoder [PDF]
Microsystems & NanoengineeringDeep reactive ion etching (DRIE) is critical for fabricating high-aspect-ratio structures in microelectromechanical systems (MEMS), yet its complex, parameter-dependent process poses significant optimization challenges.
Fang Wang +6 more
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Selective Laser Etching technology for reconfigurable microfluidic and electrochemistry-on-chip
Micro and Nano EngineeringPolydimethylsiloxane (PDMS) is widely used in academic microfluidics due to its favorable biocompatible properties and compatibility with soft lithography.
Inès Muguet +5 more
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Micro- and Nanopatterning of Highly Conductive PEDOT Thin Films. [PDF]
Macromol Rapid CommunThis work presents micro‐ and nanoscale fabrication strategies for organic thin‐film devices using non‐commercial PEDOT synthesized by V2O5‐mediated oxidative polymerization. Optimized films show controlled thickness and tunable conductivity. At the nanoscale, nanosphere lithography enables large‐area hexagonally packed PEDOT nanopillar arrays down to ...
Bisio F +8 more
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Selective laser etching fabrication of stacked microporous membranes for multisize particle separation in 3D microfluidics [PDF]
Scientific ReportsGlass substrates are widely utilized in microfluidic applications due to their exceptional properties, including optical transparency, biocompatibility, chemical and thermal stability, and compatibility with standard microfabrication techniques.
Diego Duran-Arteaga +3 more
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High-Throughput Mechanical Rupture of Nuclear Envelope and the Intracellular Dynamics of Massive Wound Repair. [PDF]
Adv Sci (Weinh)A microfluidic device with monolithically integrated nanostructures enables high‐throughput wounding of the cell membrane and nuclear envelope. The spatial distribution of charged multivesicular body protein 4B (CHMP4B) within the cell is mapped before and after wounding, showing involvement in repair of both the cell membrane and nuclear envelope ...
Fajrial AK +5 more
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Damage-Free Vertical Microfabrication of α-Quartz via HF Gas-Phase Catalyst Etching [PDF]
ACS Applied Materials & InterfacesTakahiko Yanagitani +2 more
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Bio–Microfabrication of 2D and 3D Biomimetic Gut-on-a-Chip
Micromachines, 2023 Traditional goal of microfabrication was to limitedly construct nano- and micro-geometries on silicon or quartz wafers using various semiconductor manufacturing technologies, such as photolithography, soft lithography, etching, deposition, and so on ...
Yeongseok Jang, Jinmu Jung, Jonghyun Oh
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Nano-Micro Letters, 2021 Nanomaterials are known to exhibit a number of interesting physical and chemical properties for various applications, including energy conversion and storage, nanoscale electronics, sensors and actuators, photonics devices and even for biomedical ...
Lili Zhao +8 more
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