Results 201 to 210 of about 2,889 (225)

The Design Of Excimer Lasers For Use In Microlithography

Proceedings of SPIE, 1988
Burn J Lin
exaly  

The Excimer Laser

Lucio Buratto, Stephen G. Slade, Marco Tavolato   +2 more
openaire   +1 more source

Investigation of the propagation characteristics of excimer lasers using a Hartmann–Shack sensor

Review of Scientific Instruments, 2000
Mann Klaus
exaly  

Effect of He addition on fluorine‐fueled excimer lasers

Journal of Applied Physics, 1987
Mandl A
exaly  

Excimer laser device and gas for excimer laser

2006
TERASHIMA KATSUTOMO, SUMITANI AKIRA, SUNAKA EIJI   +2 more
openaire   +1 more source

Improved beam quality in double discharge excimer lasers

Applied Optics, 1977
exaly  

Direct dissociation of F2in electron beam pumped excimer lasers: The effect on electron density

Applied Physics Letters, 1988
Mark Kushner, Kushner Mark J
exaly  

Excimer Lasers at 30 Years

Optics and Photonics News, 2003
exaly  

Excimer lasers

1998
C. Fotakis, C. Kalpouzos, T. Papazoglou
openaire   +1 more source

Excimer Lasers

1994
openaire   +1 more source