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Optical performance of LPP multilayer collector mirrors
, 2022 Paper 832217The usable power and the collector optics lifetime of high-power extreme ultraviolet light sources at 13.5 nm are considered as the major challenges in the transitioning of EUV lithography from the current pre-production phase to high volume ...Perske, Marco, Pauer, Hagen, Yulin, Sergiy, Hoffmann, Kay, Cummings, Kevin D., Trost, Marcus, Ershov, Alex, Tünnermann, Andreas, Fiedler, Tobias, Kaiser, Norbert, Feigl, Torsten, Schroeder, Sven, Böwering, Norbert, Duparré, Angela, La Fontaine, Bruno +14 morecore +1 more sourceExtreme Ultraviolet Frequency Comb Metrology [PDF]
Physical Review Letters, 2010 The remarkable precision of frequency comb (FC) lasers is transferred to the extreme ultraviolet (XUV, wavelengths shorter than 100 nm), a frequency region previously not accessable to these devices. A frequency comb at XUV wavelengths near 51 nm is generated by amplification and coherent upconversion of a pair of pulses originating from a near ...Kandula, D.Z., Gohle, C., Pinkert, T.J., Ubachs, W.M.G., Eikema, K.S.E. +4 moreopenaire +4 more sourcesOperation of a free-electron laser from the extreme ultraviolet to the water window [PDF]
, 2007 We report results on the performance of a free-electron laser operating at a wavelength of 13.7 nm where unprecedented peak and average powers for a coherent extreme-ultraviolet radiation source have been measured.T. Jezynski, REDLIN H, T. Hott, Di Pirro, G, Pucyk, P., Simon, C, CIANCHI A, NUNEZ T, E. Sombrowski, Castro, P, M. Körfer, P. Spanknebel, Zagorodnov, I, N. Baboi, SANDNER W, Brovko, O.I, Dardis, J, Poletto, L, D. Proch, Stephan, Frank, Cubaynes, D., Saldin, E. L., Feldhaus, J, Kavanagh, K., KOSTIN D, W. Ackermann, Ch, Gerth, Castellano, M., Khodyachykh, S, Pchalek, N., C. Pagani, SCHMIDT B, A. A. Sorokin, Frisch, J, PLONJES E, Yurkov, M. V., Ivanisenko, Y., KRASSILNIKOV M, Azima, A: Baboi, N, V. Miltchev, L. Petrosyan, I. Will, Oppelt, Anne, T. Edwards, H., K. Pozniak, Shabunov, A.V., Kavanagh, K, Cubaynes, D, Han, J.H., V. Yurkov, M., Shabunov, A., Feldhaus, J., Kostin, D, N, Schnepp, S., Kostin, D., Monaco, Laura, A. Sorokin, A., Roensch, J, Grecki, M., SOROKIN AA, R. Treusch, WEILAND T, M. Kollewe, Koprek, W., Yurkov, M., HAN JH, N. Pchalek, Yeates, Patrick, Schneidmiller, E. A., Tsakov, I, Flottmann, K, L. Saldin, E., HACKER K, Ross, M., Choroba, S., Sandner, W, C. Simon, R. Kammering, Kuhlmann, M., KATALEV V, Schmitz, M, BEUTNER B, Decking, W, Schneidmiller, E.A., SOMBROWSKI E, Saldin, E., I. Brovko, O., Plonjes, E, GRIMM O, CHIADRONI E, TIEDTKE K, Luna, H, G. Petrosyan, Delsim-Hashemi, H., J. Frisch, GERTH C, Grabosch, H, IVANISENKO Y, Limberg, T., Katalev, V, Nuez, T, FAATZ B, DOHLUS M, VOGEL E, K. Flöttmann, Roensch, Juliane, Krassilnikov, Mikhail, Schreiber, S., JALMUZNA W, Rossbach, J, Tischer, M, H. T. Edwards, L. Lilje, WINTER A, LUNA H, A. Bolzmann, LILJE L, Ackermann, W, MOLLER WD, Prat, E., STEPHAN F, SCHMITZ M, A. Delserieys, Stulle, F, K. Wittenburg, Lewis, C. L. S., Seidel, M, WITTENBURG K, M. Sachwitz, Gerth, C, Brovko, O.I., M. Seidel, S. Schnepp, KOCHARYAN V, Jaeschke, E., Staykov, L., Ivanisenko, H.-J. Y., B. Steffen, Katalev, V., DARDIS J, J. Pedregosa Gutierrez, Saldin, E.L., Brandt, A, H. Redlin, Korfer, M, Kennedy, E, J. T. Costello, Kennedy, E.T., SCHMUSER P, KUBE G, SIMON C, Staykov, L, Edwards, H.T., Spanknebel, P., Muller, W, Korepanov, S, Miltchev, V., Pozniak, K, C. L. S. Lewis, F. Stulle, Schreiber, Siegfried, Schmuser, P, Honkavaara, K, Sorokin, A. A., Roehrs, M, Will, Ingo, Vogel, E., Hüning, M., Roehrs, M., Miltchev, Velizar, A: Baboi, D. Kostin, Spesyvtsev, R., Rehlich, K., NICOLOSI, PIERGIORGIO, NAPIERALSKI O, TSAKOV I, PAPARELLA R, A. Azima, Düsterer, S., Petrosyan, B., Schmidt, B., I. Zagorodnov, Winter, A, C.h. Gerth, Pozniak, K., KAVANAGH K, CASTELLANO M, E. Plönjes, J. Roensch, Wellhofer, M, Hahn, U, M. Ross, Poletto, L., Asova, Galina, Luong, M., D. Sertore, Castellano, M, YEATES P, N. Golubeva, Asova, G., FROHLICH L, W. F. O. Müller, Redlin, H, Thom, H., BOLZMANN A, Asova, G, Dohlus, M, Sertore, D, Han, H., Krassilnikov, M., Müller, W.F.O., Saldin, E, Dardis, J., Martins, M, Lewis, Ciaran, Möller, W. D., H. Luna, M. Castellano, Redlin, H., Schneider, J. R., D. Cubaynes, Jaeschke, Eberhard, Yurkov, M.V., Weiland, T., JEZYNSKI T, Romaniuk, R., K. Honkavaara, Richter, M., Delsim-Hashemi, H, Luna, H., A. Eckhardt, FLOTTMANN K, Tiedtke, K, Michelato, P, Khodyachykh, S., Weiland, Thomas, RYBNIKOV V, Lipka, S., BRINKMANN R, Martins, M.,, Golubeva, N., Zagorodnov, I., KOLLEWE M, A. Winter, Görler, M., Ivanisenko, Y, Löhl, F., MARTINS M, Hahn, U., Schmüser, P., Sachwitz, M., Weise, H, Napieralski, O., LUONG M, M. Görler, M. Schmitz, Korepanov, S., KOREPANOV S, Schnepp, Sascha, Pchalek, N, SACHWITZ M, M. Kuhlmann, E. Prat, Sombrowski, E, Richter, M, W. Wurth, CATANI L, V. Rybnikov, THOM H, Oppelt, A., SCHNEPP S, Simon, C., Costello, J. T, Faatz, B., Sorokin, A.A., SPANKNEBEL P, Delsim Hashemi, H, A. Schneidmiller, E., RICHTER M, Bolzmann, A, L. Catani, Sombrowski, E., Paparella, R., LIPKA D, B. Beutner, PAGANI C, Gensch, U., Körfer, M., Nicolosi, P., Yurkov, M, Radcliffe, P, Frisch, Josef, Radcliffe, P., Schlarb, H., Vogel, E, Petersen, B., Kollewe, M., SERTORE D, Rybnikov, V, Balandin, V., Lohl, F, Meyer, M, Napoly, O, KHODYACHYKH S, Proch, D., Shabunov, A, Kennedy, Eugene T., S. Choroba, Ayvazyan, V, Grabosch, H.-J., Nolle, D, Napieralski, O, J. R. Schneider, PRAT E, J. Bähr, W. Sandner, Bahr, J, B. Petersen, A. V. Shabunov, Treusch, R., R. Schneider, J., Edwards, H. T., V. Ayvazyan, Baboi, N., NOLLE D, FRISCH J, H. Han, J., Grimm, O., Ross, Marc, CHOROBA S, M. Krassilnikov, FELDHAUS J, Eckhardt, A., MILTCHEV V, PFLUGER J, Bahr, J., L. Staykov, KORFER M, H. Delsim Hashemi, H. J. Grabosch, CUBAYNES D, KUHLMANN M, O. Napieralski, Han, Jang Hui, M. Meyer, KOPREK W, F. O. Müller, W., U. Hahn, Bähr, Jürgen W., Costello, John T., Shabunov, A. V., ACKERMANN W, LOHL F, POZNIAK K, Frisch, J., Garvey, T., Brovko, O. I., ZAGORODNOV I, Seidel, M., K. Tiedtke, Bolzmann, A., Oppelt, A, SALDIN EL, Balandin, V, Petroysan, L., Decking, W., Edwards, H.T, JAESCHKE E, Treusch, R, T. Kennedy, E., G. Asova, Lewis, C, Lipka, Dirk, Hacker, K, WELLHOFFER M, T. Garvey, CASTRO P, Chiadroni, E., Honkavaara, K., S. Düsterer, HUNING M, ROSS M, Winter, A., CIANCHI, ALESSANDRO, Brandt, A., Pagani, C., Will, I., Roensch, J., DECKING W, ROSSBACH J, Wellhöfer, M., E. Chiadroni, Brinkmann, R, V. Balandin, DELSERIEYS A, Frohlich, L, Kube, G, Schneider, J, Petrosyan, L., ROMANIUK R, Wendt, M, PEDREGOSA GUTIERREZ J, E. L. Saldin, F. Stephan, KENNEDY ET, M. Martins, SHABUNOV AV, J. Pedregosa-Gutierrez, Wittenburg, K, T. Limberg, Grabosch, Hans-Jürgen, Grabosch, H., ECKHARDT A, Wurth, W, Jalmuzna, W, Schmitz, M., Delserieys, A, Steffen, Bernhard, D. Möller, W., Müller, W., Moller, W, Gretchko, V., Schnepp, S, M. Tischer, Zagorodnov, Igor A., Sachwitz, M, Castro, P., PUCYK P, S. Schreiber, Yeates, P, ROENSCH J, Spanknebel, P, Vogel, E. M., NAPOLY O, Cianchi, A, RADCLIFFE P, YURKOV MV, Jezynski, T., Martins, M., Pedregosa-Gutierrez, J, K. Hacker, Chiadroni, E, Edwards, H. T, Michelato, P., U. Gensch, Möller, W., GRECKI M, Rehlich, K, R. Spesyvtsev, Edwards, A., Lewis, S., R. Brinkmann, W. D. Möller, Brinkmann, R., E. T. Kennedy, Dohlus, M., Delserieys, A., W. Decking, Ackermann, Wolfgang, O. Napoly, Wurth, W., P. Nicolosi, Hott, T., AYVAZYAN V, HAHN U, Toleikis, S, Han, J, Kavanagh, Kevin D., Sandner, Wolfgang, M. V. Yurkov, I. Tsakov, D. Nölle, Lilje, L, Catani, L., Weise, H., MULLER WFO, SIMROCK S, ROEHRS M, Monaco, L, Dohlus, Martin, STAYKOV L, M. Hüning, J. H. Han, S. Toleikis, Plönjes, E., Schneidmiller, E, Meyer, M., A. Brandt, V. Shabunov, A., DUSTERER S, Körfer, Markus, Beutner, B., Sandner, W., Garvey, T, Hott, T, OPPELT A, MEYER M, P. Castro, Petrosyan, G., Flöttmann, A., Stephan, F., Wendt, M., Jezynski, W., Grimm, O, Gensch, U, Grecki, M, Kennedy, E. T., Stephan, F, SCHNEIDMILLER EA, Yeates, P., Zapfe, K., Steffen, B, M. Grecki, B. Faatz, COSTELLO JT, A. Oppelt, STULLE F, T. Weiland, Rossbach, J., GORLER M, SEIDEL M, Schmidt, B, SCHREIBER S, LIMBERG T, Brovko, I., Kocharyan, V., Kube, G., PETERSEN B, Azima, SCHLARB H, Schlarb, H, Faatz, B, PROCH D, Ross, M, Lipka, D., Schmüser, Peter, Trines, D., Schreiber, S, HONKAVAARA K, Simrock, S, Romaniuk, R, Khodyachykh, Sergiy, Pflüger, J., Miltchev, V, M. Richter, Rybnikov, V., Costello, J.T, Möller, W.D., Simrock, S., Jaeschke, E, Delserieys, Alice, Petrosyan, Bagrat, Stulle, F., BAHR J, WURTH W, Beutner, B, REHLICH K, GARVEY T, MICHELATO P, W. Jalmuzna, Pagani, Carlo, POLETTO L, Costello, T., K. Rehlich, Spesyvtsev, R, G. Kube, H. Thom, Gerth, Ch., Gensch, Ulrich, Tsakov, I., Schneider, J.R., S. Khodyachykh, E. A. Schneidmiller, Sorokin, A, Paparella, R, Michelato, Paolo, Toleikis, S., H. Weise, Martins, M., Corriea, Klose, K., Prat, E, P. Pucyk, Kammering, R, BALANDIN V, P. Schmüser, Catani, L, Fröhlich, L., TREUSCH R, Luong, M, Ch. Gerth, M. Dohlus, Costello, J.T., HOTT T, TRINES D, Krassilnikov, M, A. Cianchi, E. Jaeschke, Tsakov, Ivan, PETROSYAN L, Klose, K, V. Kocharyan, J. Pflüger, ASOVA G, L. Fröhlich, Edwards, H., K. Zapfe, MONACO L, PETROSYAN B, Napoly, O., Grimm, Oliver, Tischer, M., PETROSYAN G, Ayvazyan, V., SPESYVTSEV R, Koprek, W, K. Klose, Sertore, Daniele, Limberg, T, M. Wellhöfer, M. Roehrs, Staykov, Lazar, BRANDT A, GRABOSCH HJ, Pucyk, P, S. Korepanov, Golubeva, N, Petersen, B, Nölle, D., Lilje, L., WEISE H, Cianchi, A., Monaco, L., Pfluger, J, SCHNEIDER JR, WENDT M, Flöttmann, K., Kuhlmann, M, D. Trines, Ackermann, W., T. Costello, J., Brovko, O. I, O. I. Brovko, KLOSE K, O. Grimm, Eckhardt, A, J. Feldhaus, KAMMERING R, Sertore, D., Will, I, Schneidmiller, A., Proch, D, P. Michelato, GENSCH U, DELSIM HASHEMI H, PCHALEK N, Gorler, M, Jalmuzna, W., H. Schlarb, Tiedtke, K., Rossbach, Jörg, TOLEIKIS S, Y. Ivanisenko, L. S. Lewis, C., Müller, W. F. O., STEFFEN B, Dusterer, S, TISCHER M, R. Romaniuk, ZAPFE K., Flöttmann, Klaus, Wittenburg, K., Weiland, T, Nuñez, T., Nicolosi, P, Azima, A., Petrosyan, B, T. Nuñez, Kammering, R., H.-J. Grabosch, Steffen, B., Lipka, D, Dardis, John, EDWARDS HT, J. Rossbach, B. Schmidt, Kocharyan, V, Costello, J. T., AZIMA A, Kennedy, T., GOLUBEVA N, Huning, M, M. Luong, H. Delsim-Hashemi, DI PIRRO G, Jezynski, T, Sorokin, A., L. Monaco, M. Wendt, Trines, D, Di Pirro, G., Pedregosa-Gutierrez, J., R. Paparella, LEWIS CLS, B. Petrosyan, Schneider, R., L. Poletto, E. Vogel, BABOI N, WILL I, BROVKO OI, K. Kavanagh, F. Löhl, G. Di Pirro, Pedregosa Gutierrez, J, J. Dardis, Kollewe, M, P. Radcliffe, Pagani, C, Choroba, S, Thom, H, P. Yeates, Han, J. H., Petrosyan, G, V. Katalev, Müller, Wolfgang Franz Otto, Petrosyan, L, D. Lipka, Hacker, K., W. Koprek, S. Simrock +731 morecore +1 more sourceElectrostatic chucking of EUVL masks: Coefficients of friction
, 2022 Art. 76362JIn extreme ultraviolet lithography (EUVL), the mask hangs on an electrostatic chuck and is moved laterally during exposition. For proper control of the chucked mask under corresponding inertial forces, static friction of the mask on the chuck ...Peschel, T., Müller, S., Bauer, R., Kalkowski, G., Risse, S., Damm, C., Semmler, C. +6 morecore +1 more sourceCompact Plasma-Based Soft X-Ray Lasers
IEEE Photonics Journal, 2010 This paper reviews the major accomplishments in the demonstration of plasmabased soft x-ray lasers in 2009. Advances in shaping the plasma density and increasing the pump power have enabled the engineering of table-top laser systems operating at ...Jorge J. Roccadoaj +1 more sourceAttenuated PSM for EUV
, 2022 Paper 1058312, 13 S.The understanding, characterization and mitigation of 3D mask effects including telecentricity errors, contrast fading and best focus shifts becomes increasingly important for the performance optimization of future extreme ultraviolet Evanschitzky, P., Philipsen, V., Erdmann, A., Mesilhy, H., Hendrickx, E., Bauer, M. +5 morecore +1 more source
