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Micromachining with femtosecond lasers
Technical Digest. Summaries of Papers Presented at the Conference on Lasers and Electro-Optics. Conference Edition. 1998 Technical Digest Series, Vol.6 (IEEE Cat. No.98CH36178), 1998Summary form only given. Two industrial applications of ultrashort-pulse machining process will be presented in this contribution. For the automotive industry, the production of high-aspect-ratio high-quality microholes for injection nozzles is required.
S. Nolte +6 more
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Femtosecond laser micromachining of sapphire
LEOS 2001. 14th Annual Meeting of the IEEE Lasers and Electro-Optics Society (Cat. No.01CH37242), 200250 fs pulse laser micromachining of sapphire has been demonstrated. The smooth and clean features and high ablation rate have proven the suitability of this technique for micro-scale machining of this technologically important material.
K.-S. Kim +4 more
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Non-reciprocal femtosecond laser micromachining
2008 Conference on Lasers and Electro-Optics, 2008The authors demonstrate both experimentally and theoretically that in a non-centrosymmetric crystal modification of the material can be different when femtosecond laser beam propagates in opposite directions. Our result presents the first evidence of non-reciprocal photosensitivity.
Peter G. Kazansky +2 more
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Titanium micromachining by femtosecond laser
Optics and Lasers in Engineering, 2012Abstract The ultimate goal of this research was to characterize the ablation depth with respect to pulse energy, translation speed, and consecutive passes in order to obtain the parameters to have smooth microchannel surfaces. A logarithmic dependence of the channel depth on the laser pulse energy was observed with two different distinct ablation ...
Vural Kara, Huseyin Kizil
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Femtosecond laser micromachining of silicon
ICALEO 2001: Proceedings of the Laser Materials Processing Conference and Laser Microfabrication Conference, 2001Results are presented for micromachining of single crystal (<100> orientation) of silicon using a femtosecond Ti:Sapphire laser from Spectra Physics of 2mJ energy, 100 fs pulse width, 10 kHz repetition rate and wavelength of 790 nm. Some of the results include: measurements of femtosecond laser characteristics, effect of beam focus ...
M. El-Bandrawy, Mool C. Gupta
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Femtosecond laser micromachining study in CVD diamond
Latin America Optics and Photonics (LAOP) Conference 2022, 2022Diamond is a highly sought after material for photonic applications. In this work, the incubation effect was studied at 1030 nm, which could improve the fs-laser micromachining processing technique in such material.
Lucas Konaka Nolasco +1 more
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An Investigation of Femtosecond Laser Micromachining
2005 International Conference on MEMS,NANO and Smart Systems, 2006Femtosecond laser micromachining is a new approach emerging in MEMS area in recent years. Although some applications have been reported, this technology is still not matured and not understood very well. Femtosecond lasers currently show much promise as potential effective tools in micromachining or micro-system applications, which include industrial ...
null Ming Xia, null Yiliu Tu
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Femtosecond Laser Micromachining
2013Ultrashort laser pulses with durations in the femtosecond range up to a few picoseconds provide a unique method for the structuring of practically all materials with high precision and minimal thermal and mechanical influence of the surrounding. Due to the high intensities obtained in the focal volume even at moderate pulse energies not only surface ...
Loren Cerami +3 more
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OCT-aided femtosecond laser micromachining device
SPIE Proceedings, 2009Fs-lasers are widely used for microsurgery and micromachining. Due to nonlinear interaction of ultrashort pulses with tissue or matter precisions of a few μm can be achieved. But particularly in the field of surgery this precision can not be obtained as the devices for diagnostics and treatment have to be changed due to separate systems.
Ole Massow +4 more
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Femtosecond laser micromachining and biological therapy
Laser Physics, 2008Nonlinear micromachining with femtosecond laser pulses has attracted much attention in microphotonics and biophotonics. In this paper, we demonstrate the fabrication of optical elements in bulk transparent materials, direct welding between transparent substrates, and subcellular ablation in living cells by focusing femtosecond laser pulses.
W. Watanabe, T. Tamaki, K. Itoh
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