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Introduction to micromachining with femtosecond laser pulses
ICALEO 2002: 21st International Congress on Laser Materials Processing and Laser Microfabrication, 2002Micromachining with lasers is an evolving technology. Initially laser micromachining was based on continuous-wave or long-pulse lasers. However, these lasers, transferred heat to the work piece, introducing limitations in the precision and quality of the machining process.
Philippe Bado, Ali Said, William Clark
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Femtosecond Laser Micromachining for Volume Optics Fabrication
Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, 2009A femtosecond laser is used to create a new type of volumetric diffractive optical element. The structured elements are designed to perform diffractive functions including pattern generation, and angular multiplexing.
Tim D. Gerke, Rafael Piestun
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Femtosecond Laser Micromachining of a-Si:H
2014Femtosecond laser micromachining has been used to write bulk waveguides and photonic devices in glasses, polymers, and crystalline silicon (Gattass and Mazur, Nat Photonics 2:219–225, 2008). Refractive index changes in these materials tend to be less than a percent, which sets limitations on applications due to low light confinement.
Michael Moebius, E. Mazur
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Femtosecond laser micromachining of technical materials
Proceedings of SPIE, 2000ABSTRACT Micromachining experiments were performed with Ti:sapphire laser pulses (130 fs - 150 fs, 800 nm, -40 Hz) in air. Employing the direct focusing technique, highly absorbing titanium nitride (TiN) and weakly absorbing polyiniide (P1) andpolymethylmethacrylate (PMMA) served as target materials.
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Femtosecond laser micromachining of microfluidic fiber sensors
2016 15th International Conference on Optical Communications and Networks (ICOCN), 2016Migration of lab-on-chip configurations into the optical fiber platform opens the revolutionary prospect of lab-in-fiber systems on the basis of an efficient optical transport highway for multifunctional sensing. In this paper, three-dimensional microfluidic channels patterning inside the fiber by femtosecond laser ablation, femtosecond laser assisted ...
null Changrui Liao +6 more
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Femtosecond Laser Micromachining of Metal Thin Films
Materials Today: Proceedings, 2019Abstract In this paper the possibilities of femtosecond laser micromachining of thin-film titanium coatings for elements of microelectronics and optoelectronics are considered. Using pulsed laser deposition in vacuum (wavelength λ = 1030 nm, pulse repetition frequency f = 10 kHz, Emax pulse energy ≈ 150 μJ, pulse duration τ ≈ 280 fs), a thin-film ...
Ruslan Chkalov +2 more
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Micromachining of copper by femtosecond laser pulses
Applied Surface Science, 2013Abstract Simulation results of femtosecond laser ablation of copper were compared to experimental data. The numerical analysis was performed using a predictive model, including a two temperature model, an optical critical point model with three Lorentzian terms, two phase change models for melting and evaporation under superheating, and a phase ...
S.Y. Wang +4 more
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Micromachining of SiC by femtosecond laser ablation
Technical Digest. CLEO/Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.01TH8557), 2002High-speed etching of single-crystal 6H-SiC by femtosecond Ti:sapphire laser ablation was demonstrated. Fine line pattern of 60 /spl mu/m in depth was fabricated with relatively smooth etched surface with little damage.
N. Aoki +8 more
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Micromachining of PZT Using Ultrafast Femtosecond Laser
Ferroelectrics Letters Section, 2005Pb(Zr, Ti)O3 (PZT) is widely used in various actuator and transducers applications. Recently, the emphasis has been on the fabrication of the micro actuation systems using PZT's. Fabrication of the micro components requires evolution of surface features and machining on the micrometer scale.
NITIN UPPAL +2 more
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Sapphire surface patterning using femtosecond laser micromachining
Applied Physics A, 2012This study presents an alternative method for micron-resolution patterning of a sapphire surface utilizing the characteristic of an ultra-short pulse (10−15 s) from ytterbium (Yb) femtosecond laser (FS-laser) irradiation. Conventional processes often involve several steps, such as wet chemical or dry etching, for surface structuring of sapphire.
Cho-Wei Chang +5 more
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