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Gettering of gold and copper with implanted carbon in silicon
Applied Physics Letters, 1988N W Cheung, Paul K Chu, Wong H
exaly
Direct comparison of ion−damage gettering and phosphorus−diffusion gettering of Au in Si
Journal of Applied Physics, 1975T E Seidel, R L Meek, Seidel T E
exaly
Fundamental properties of intrinsic gettering of iron in a silicon wafer
Journal of Applied Physics, 1992Akito Hara, Akira Ohsawa
exaly
Gettering mechanisms in silicon
Journal of Applied Physics, 1988M L Polignano, C Claeys, Polignano M L
exaly

