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Gettering of gold and copper with implanted carbon in silicon

Applied Physics Letters, 1988
N W Cheung, Paul K Chu, Wong H
exaly  

Direct comparison of ion−damage gettering and phosphorus−diffusion gettering of Au in Si

Journal of Applied Physics, 1975
T E Seidel, R L Meek, Seidel T E
exaly  

Fundamental properties of intrinsic gettering of iron in a silicon wafer

Journal of Applied Physics, 1992
Akito Hara, Akira Ohsawa
exaly  

Gettering mechanisms in silicon

Journal of Applied Physics, 1988
M L Polignano, C Claeys, Polignano M L
exaly  

Encouraging a Go-Getter

Proceedings of the 25th ACM Conference on Economics and Computation
openaire   +1 more source

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