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A comparison of gettering techniques for very large scale integration
Journal of Applied Physics, 1984Maria Luisa Polignano
exaly
Evaporative Getter and Getter-Ion Pumps with Thermal Deposition of Getter Films
2019openaire +1 more source
Gettering of gold and copper with implanted carbon in silicon
Applied Physics Letters, 1988Paul Chu
exaly
Gettering mechanisms in silicon
Journal of Applied Physics, 1988Maria Luisa Polignano, C Claeys
exaly
Proximity gettering with mega‐electron‐volt carbon and oxygen implantations
Applied Physics Letters, 1988exaly