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Defect characterization and gettering effect in excimer laser gettering
Electronics and Communications in Japan (Part II: Electronics), 1990AbstractThe mechanism and effect of a new extrinsic gettering method utilizing excimer laser irradiation called excimer laser gettering (ELG) was examined by transmission electron microscopy (TEM) observation and measurements of the electric properties of metal‐oxide‐semiconductor (MOS) capacitors.
Akira Sakai +5 more
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1959
Various gettering materials are used to shorten the exhaust process, to improve or maintain the vacuum in sealed-off tubes or to maintain the purity of rare gases in gas-filled tubes. In the simplest case, large, particularly porous surface areas of glass or carbon cooled much below room temperature, may be used.
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Various gettering materials are used to shorten the exhaust process, to improve or maintain the vacuum in sealed-off tubes or to maintain the purity of rare gases in gas-filled tubes. In the simplest case, large, particularly porous surface areas of glass or carbon cooled much below room temperature, may be used.
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AIP Conference Proceedings, 1984
The three main gettering techniques (preoxidation gettering on the other side, silicon gettering by segregation, internal gettering) are considered. The techniques are compared in relation to: extended defects, impurities, process compatibility and residual leakage current.
G. F. Cerofolini, M. L. Polignano
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The three main gettering techniques (preoxidation gettering on the other side, silicon gettering by segregation, internal gettering) are considered. The techniques are compared in relation to: extended defects, impurities, process compatibility and residual leakage current.
G. F. Cerofolini, M. L. Polignano
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Multicomponent Getter Films for Getter-Ion Pumps
Journal of Vacuum Science and Technology, 1969Since the first commercial application of getter-ion pumping, a single metal, such as titanium, has usually been employed for this purpose. However, data obtained several years ago for bulk gettering, i.e., volume absorption of gases by heated materials, showed considerable increases in gettering rates for certain binary alloy compositions over the ...
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Journal of Applied Physics, 1989
A series of gettering experiments have been carried out for a better understanding of gettering mechanism(s) in silicon. We find that oxidation and oxynitridation, which are known to inject silicon interstitials, do not getter metallic impurities such as Au, Cu, Fe, and Ni while phosphorus (P) diffusion does produce effective gettering of these metals.
J. S. Kang, D. K. Schroder
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A series of gettering experiments have been carried out for a better understanding of gettering mechanism(s) in silicon. We find that oxidation and oxynitridation, which are known to inject silicon interstitials, do not getter metallic impurities such as Au, Cu, Fe, and Ni while phosphorus (P) diffusion does produce effective gettering of these metals.
J. S. Kang, D. K. Schroder
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The Arithmetic Teacher, 1968
It is generally recognized that it is important for a teacher to maintain pupil interest in arithmetic. The use of a variety of learning activities is an excellent technique for retaining pupil interest. One technique is to use one class period per week for presenting “interest getters.” Friday is usually a good day to present these, for the teacher ...
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It is generally recognized that it is important for a teacher to maintain pupil interest in arithmetic. The use of a variety of learning activities is an excellent technique for retaining pupil interest. One technique is to use one class period per week for presenting “interest getters.” Friday is usually a good day to present these, for the teacher ...
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