Results 11 to 20 of about 139,418 (293)
Measurement of Wafer Focus by Grating Shearing Interferometry
Applied Sciences, 2020 A method applied for improving the measurement precision and efficiency of wafer focusing in an optical lithography instrument (OLI) is introduced. Based on grating shearing interferometry, the defocus and tilt of the wafer are measured by testing the ...
Jian Wang, Song Hu, Xianchang Zhu
doaj +1 more source
Precision grating for measuring microscope lens distortions [PDF]
International Journal of Metrology and Quality Engineering, 2010 Microscopy is used in most technology processes where two-dimensional distributions, that are digital images of the shape and appearance of integrated circuit (IC) features, reveal important information.
Jiang L.
doaj +1 more source
A processing method for rough cutting hourglass worm on general NC lathe
Journal of Advanced Mechanical Design, Systems, and Manufacturing, 2019 The manufacturing method of two spatial-orthogonal rotary axis linkage is usually used to cut hourglass worm. However, the traditional processing method of roughing tooth groove depends on the special machine, specific tool, and its processing efficiency
Xinyang QIU +3 more
doaj +1 more source
Theoretical Investigation on Microcavity Coupler for Terahertz Quantum-Well Infrared Photodetectors
IEEE Access, 2020 Resonant behaviors and absorption enhancement of metallic grating-dielectric-metal (GDM) microcavity are theoretically investigated. The GDM structure is treated as periodic unit cells of two serially-connected metal-dielectric-metal (MDM) and air ...
Xuguang Guo +5 more
doaj +1 more source
Birefringent optofluidic gratings
Optics Express, 2020 A set of parallel microfluidic channels behaving as a diffraction grating operating in the Raman-Nath regime has been fabricated and studied. The diffraction efficiency of such structure can be tuned by selecting a liquid with a particular refractive index and/or optical anisotropy.
Sergio Calixto +4 more
openaire +4 more sources
Biosensors, 2021 Guided-mode resonance (GMR) sensors are widely used as biosensors with the advantages of simple structure, easy detection schemes, high efficiency, and narrow linewidth. However, their applications are limited by their relatively low sensitivity (
Chengrui Zhang +5 more
doaj +1 more source
Recent Progress in X-ray and Neutron Phase Imaging with Gratings
Quantum Beam Science, 2020 Under the JST-ERATO project in progress to develop X-ray and neutron phase-imaging methods together, recent achievements have been selected and reviewed after describing the merit and the principle of the phase imaging method.
Atsushi Momose +6 more
doaj +1 more source
Fabrication of X-ray Gratings for Interferometric Imaging by Conformal Seedless Gold Electroplating
Micromachines, 2021 We present a method to produce small pitch gratings for X-ray interferometric imaging applications, allowing the phase sensitivity to be increased and/or the length of the laboratory setup to be minimized.
Konstantins Jefimovs +7 more
doaj +1 more source
Dataset for SERS Plasmonic Array: Width, Spacing, and Thin Film Oxide Thickness Optimization
Data, 2018 Surface-enhanced Raman spectroscopy (SERS) improves the scope and power of Raman spectroscopy by taking advantage of plasmonic nanostructures, which have the potential to enhance Raman signal strength by several orders of magnitude, which can allow for ...
Christopher M. Klenke +5 more
doaj +1 more source