Comparison between Silicon Nanopillars Prepared by Bosch Process and Metal Assisted Chemical Etching
, 2018 Nanopillars fabricated by Metal Assisted Chemical Etching (MacEtch) wet-etch process have been compared with those by Bosch dry-etch process. The Bosch process in this study gave vertical nanopillars with smooth side walls, which was better than the ...
Chaudhary, Rimjhim
core
Catalyst screening for electrochemical ammonia synthesis: a critical review. [PDF]
Nanoscale AdvJammal DG +4 more
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Gaussian Process models for Virtual Metrology of the Bosch Process
The increasing complexity of plasma etching in semiconductor manufacturing, particularly in the Bosch process, presents significant challenges for traditional metrology techniques. Conventional measurement-based approaches struggle with scalability, high
Mehraban, Zahra
core
Ammonia Synthesis via Electrochemical Conversion. [PDF]
MoleculesMartín-Marroquín JM, Hidalgo D.
europepmc +1 more source
Single-Atom Catalysts for Low-Temperature Thermocatalytic Ammonia Synthesis. [PDF]
MoleculesArroyo-Caire J +2 more
europepmc +1 more source
Heterogeneous Catalysis Is Full of Challenges. [PDF]
MoleculesHuang L, Zhu Y.
europepmc +1 more source
Solar-driven thermochemical tri-generation of electricity, hydrogen, and green ammonia with AI-assisted triple-objective optimization. [PDF]
Sci RepAyadi B +7 more
europepmc +1 more source
Integrated valorization of industrial and municipal biomass wastes for green ammonia production: a circular bioeconomy approach. [PDF]
Front ChemAlGhamdi A +3 more
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Bio-Inspired Photocatalytic Nitrogen Fixation: From Nitrogenase Mimicry to Advanced Artificial Systems. [PDF]
Nanomaterials (Basel)Xia W +11 more
europepmc +1 more source