Results 221 to 230 of about 980 (262)

Dip-in Nanomechanical Probes for Mass Characterization of Nanoparticles in Ultra-Low Volume Liquid Suspensions. [PDF]

open access: yesSmall
Molina J   +7 more
europepmc   +1 more source

MEMS-based hemispherical resonator gyroscopes [PDF]

open access: yes2012 IEEE Sensors, 2012
This paper introduces a fabrication technique that uses planar MEMS micromachining processes to produce hemispherical resonating shells for gyroscopes. The hemispheres exhibit a quality factor in excess of 20,000 with resonant frequencies in the range of 20 kHz for the 4-node wineglass mode.
P. Pai   +3 more
openaire   +2 more sources

Laser-printed hemispherical silicon Mie resonators

Optics Letters, 2021
Subwavelength nanostructures made of high-index low-loss materials have revolutionized the fields of linear and nonlinear nanophotonics, stimulating growing demands for efficient and inexpensive fabrication technologies. Here, we demonstrate high-precision and reproducible printing of hemispherical Si nanoparticles (NPs) via controllable dewetting of ...
Sergey Syubaev   +3 more
openaire   +2 more sources

The Layered Hemispherical Resonator for Dielectrometry

2006 16th International Crimean Microwave and Telecommunication Technology, 2006
The characteristic equation for complex frequencies of layered dielectric resonator was obtained. The eigenfrequencies and Q-factors depending on diameter of inner layer at the presence of different substances are presented. The numerical investigations of whispering gallery modes of QDR are performed. The possibility of using such type of resonator as
Yu. Prokopenko   +2 more
openaire   +1 more source

A MEMS diamond hemispherical resonator

Journal of Micromechanics and Microengineering, 2013
In this paper we report the fabrication of hemispherical polycrystalline diamond resonators fabricated on a novel high-temperature glass substrate. The hemispherical resonator gyroscope is one of the most accurate and rugged of the mechanical gyroscopes, and can be operated in either rate or whole-angle mode due to its high degree of symmetry.
J J Bernstein   +5 more
openaire   +1 more source

Metallic Glass Hemispherical Shell Resonators

Journal of Microelectromechanical Systems, 2015
By utilizing bulk metallic glasses' (BMGs) unique combination of amorphous structure, material properties, and fabrication opportunities, ultrasmooth and symmetric 3-D metallic glass resonators that are complimentary metal oxide semiconductor (CMOS) post-processing compatible are fabricated.
Michael Kanik   +6 more
openaire   +1 more source

Anchor Loss in Hemispherical Shell Resonators

Journal of Microelectromechanical Systems, 2017
Micromachined hemispherical shell resonators (HSRs) can be used in high accuracy vibratory gyroscopes. These resonators need to have very low energy loss to achieve very high quality factor. Energy might be lost through the anchor, fluid-structure interaction, thermoelastic dissipation, phonon-phonon and phonon-electron interactions, and the resonator ...
Ali Darvishian   +4 more
openaire   +1 more source

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