Method for Keyhole-Free High-Aspect-Ratio Trench Refill by LPCVD [PDF]
Micromachines, 2022 In micro-machined micro-electromechanical systems (MEMS), refilled high-aspect-ratio trench structures are used for different applications. However, these trenches often show keyholes, which have an impact on the performance of the devices. In this paper,
Henk-Willem Veltkamp +6 more
doaj +2 more sources
A High-Aspect-Ratio Deterministic Lateral Displacement Array for High-Throughput Fractionation [PDF]
MicromachinesFuture industrial applications of microparticle fractionation with deterministic lateral displacement (DLD) devices are hindered by exceedingly low throughput rates.
Jonathan Kottmeier +4 more
doaj +2 more sources
Toward laser-induced tuning of plasmonic response in high aspect ratio gold nanostructures [PDF]
Nanophotonics, 2022 High aspect-ratio gold nanostructures sustain Fabry–Perot-like surface plasmon responses from infrared to visible light energies. We show that some resonances can be tuned by means of laser irradiation, where low energy modes stay unperturbed.
Pelaez-Fernandez Mario +6 more
doaj +2 more sources
High Speed Microactuators for Low Aspect Ratio High Speed Micro Aircraft Surfaces
Actuators, 2021 This paper covers a class of actuators for modern high speed, high performance subscale aircraft. The paper starts with an explanation of the challenges faced by micro aircraft, including low power, extremely tight volume constraints, and high actuator ...
Ronald Barrett-Gonzalez, Nathan Wolf
doaj +1 more source
High-aspect-ratio nanoimprint process chains [PDF]
Microsystems & Nanoengineering, 2017 AbstractDifferent methods capable of developing complex structures and building elements with high-aspect-ratio nanostructures combined with microstructures, which are of interest in nanophotonics, are presented. As originals for subsequent replication steps, two families of masters were developed: (i) 3.2 μm deep, 180 nm wide trenches were fabricated ...
Cadarso, Víctor J. +3 more
openaire +2 more sources
Optical Detection Method for High Aspect Ratio Microstructures
Micromachines, 2020 High aspect ratio microstructures (HARMS) are of great importance for many application fields. Many defects are generated during the fabrication processes, especially in line microstructures, and it is necessary to examine the quality of the structures ...
Wenbin Wei +8 more
doaj +1 more source
High-Aspect-Ratio Silicon Metasurfaces: Design, Fabrication, and Characterization
Applied Sciences, 2023 Unrestricted manipulations on terahertz (THz) waves are highly desired in integration-optics, but THz devices based on conventional materials are usually bulky in size.
Yao Yao +6 more
doaj +1 more source
Lateral attitude control of solar-powered UAV with high aspect ratio
Xibei Gongye Daxue Xuebao, 2022 A solar-powered UAV usually has a high-aspect-ratio and flexible structural design. Its aerodynamic and mass characteristics are different from those of a conventional aircraft.
WANG Bo, ZHANG He, GAO Zhenghong
doaj +1 more source
Aspect-ratio-dependent charging in high-density plasmas [PDF]
, 1997 The effect of aspect ratio (depth/width) on charge buildup in trenches during plasma etching of polysilicon-on-insulator structures is studied by Monte Carlo simulations.
Giapis, Konstantinos P. +1 more
core +1 more source
Bioinspired Polymeric High‐Aspect‐Ratio Particles with Asymmetric Janus Functionalities
Advanced NanoBiomed Research, 2021 Polymeric particles with intricate morphologies and properties have been developed based on bioinspired designs for applications in regenerative medicine, tissue engineering, and drug delivery.
Joel A. Finbloom +2 more
doaj +1 more source