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Ultra-high aspect-ratio FinFET technology
Solid-State Electronics, 2010FinFETs with ultra-large height-to-width ratio have been processed on (1 1 0) bulk silicon wafers by employing crystallographic etching of silicon with TMAH, which results in nearly vertical sidewalls with a (1 1 1)/ surface orientation. Tall fins, which corresponds to wide transistor channels per single fin offer more efficient use of the silicon area
Jovanović, Vladimir +4 more
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High aspect-ratio polysilicon micromachining technology
Sensors and Actuators A: Physical, 2000This paper presents a single wafer, all-silicon, high aspect-ratio multi-layer polysilicon micromachining technology that combines deep dry etching of silicon with conventional surface micromachining to realize tens to hundreds of microns thick, high aspect-ratio, electrically isolated polysilicon structures with sub-micron air-gaps.
Farrokh Ayazi, Khalil Najafi
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Female erectile tissues and sexual dysfunction after pelvic radiotherapy: A scoping review
Ca-A Cancer Journal for Clinicians, 2022Deborah C Marshall, Mas +2 more
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Directed Water Shedding on High‐Aspect‐Ratio Shape Memory Polymer Micropillar Arrays
Advanced Materials, 2014Shu Yang
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