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Hot embossing by Joule heating
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2008J. C. Lee +3 more
openaire +1 more source
Recent developments in hot embossing – a review
Materials and Manufacturing Processes, 2021Arjyajyoti Goswami, Swarup S Deshmukh
exaly
A novel hot embossing process for producing high-quality glass micro-pillar arrays
Journal of Cleaner Production, 2023Yang Gao, Feng Gong, Jianzhi Li
exaly
Flow behaviour of thin polymer films used for hot embossing lithography
Microelectronic Engineering, 2000H Schift, J Gobrecht
exaly
Recovery behavior of thermoplastic polymers in micro hot embossing process
Journal of Materials Processing Technology, 2017Jun Ni, Peiyun Yi, Yixi Zhao
exaly