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Research on optimization of the hot embossing process
Journal of Micromechanics and Microengineering, 2007The hot embossing of polymer was studied to improve product quality. The finite element method (FEM) was used to analyze the embossing step, the cooling step and the demolding step with respect to product quality. The numerical simulation results show that profile precision is largely influenced by the topological structure of the mold during the ...
Yong He, Jian-Zhong Fu, Zi-Chen Chen
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The Research of the Extrusion Hot Embossing Process
Advanced Materials Research, 2011In this paper,we analysed the problems that existed in the extrusion hot embossing process.To slove these problems,we designed a new extrusion hot embossing process and verified the effectiveness and feasibility of this process through experiments.The thickness and temperature of the extruded polymer film were affected by various factors.It is very ...
Wen Long Liu +3 more
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Hot embossing of micro-featured devices
IEEE International Conference on Mechatronics, 2005. ICM '05., 2005Polymer microfabrication methods are becoming increasingly important as low-cost alternatives to the silicon or glass-based MEMS technologies. In this study, micro molding via hot embossing was applied to micro-featured used for DNA/RNA test. LIGA like process using UV light aligner was used to prepare silicon based SU-8 photoresist followed by ...
S.C. Chen +3 more
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Nanostructuring of polymers by hot embossing lithography
SPIE Proceedings, 2004While researchers of ever more advanced NGL systems are still struggling to demonstrate the feasibility to manufacture features well below 100 nm at an affordable cost and a reasonable throughput, nanoimprint technologies are emerging as a possible answer to these challenges.
Hella-Christin Scheer +3 more
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Microfluidic Device Fabrication by Thermoplastic Hot-Embossing
2012Due to their low cost compatibility with replication-based fabrication methods, thermoplastics represent an exceptionally attractive family of materials for the fabrication of lab-on-a-chip platforms. A diverse range of thermoplastic materials suitable for microfluidic fabrication is available, offering a wide selection of mechanical and chemical ...
Shuang, Yang, Don L, Devoe
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Parameters of hot embossing in microfluidic chips
SPIE Proceedings, 2010Twice hot-embossing, a new technology of hot-embossing proposed, can effectively reduce the error of hot forming caused by hot equipment. The depth / width ratio of micro-channel on the metal concave-mother-template is an influence parameter of twice hot-embossing; Optimization of the parameters, the PMMA convex-template has been produced in 120°C, ±
Wei Wang +5 more
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An enlarged process window for hot embossing
Journal of Micromechanics and Microengineering, 2008Hot embossing an open-die process with a flat mold has limited capabilities in embossing thick films with high-aspect-ratio microstructures. The process suffers from a small process window due to a coupled control scheme for both embossing pressure and embossing thickness.
Donggang Yao +1 more
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Hot embossing of micrographic elements in polypropylene
Microelectronic Engineering, 2007Micrographic features generated by electron beam lithography have been hot embossed in biaxially-oriented polypropylene (BOPP). Each micrographic element consisted of a sub-field of 30x30@mm with a specific configuration of symbols, lettering and graphics.
Patrick W. Leech +3 more
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Resin micromachining by roller hot embossing
Microsystem Technologies, 2008The roller hot embossing is an efficient process of manufacture in which patterns are continuously transcribed on film, etc. Recently, the application of the embossing roll to the manufacturing processes of micro parts is paid attention. In this paper, we examined the development of the embossing roll with patterns of micron level and we tried to make ...
Naoya Ishizawa +4 more
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Rapid hot embossing of polymer microfeatures
Microsystem Technologies, 2006Although the hot embossing process is gaining popularity in molding polymer micro/nano structures, it needs a breakthrough improvement in reducing cycle time before it can become a mass-production process. In this study, an embossing tool with a rapid heating and cooling capability was investigated to reduce the cycle time.
Thomas E. Kimerling +3 more
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