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Hot embossing of cyclic olefin copolymers
Journal of Micromechanics and Microengineering, 2009The hot embossing properties of cyclic olefin copolymer (COC) have been examined as a function of comonomer content. Six standard grades of COC with varying norbornene content (61?82 wt%) were used in these experiments in order to provide a range of glass transition temperatures, Tg.
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Recent developments in hot embossing – a review
Materials and Manufacturing Processes, 2021Swarup S Deshmukh, Arjyajyoti Goswami
exaly
Hot embossing by Joule heating
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 2008J. C. Lee +3 more
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A novel hot embossing process for producing high-quality glass micro-pillar arrays
Journal of Cleaner Production, 2023Jianzhi Li, Feng Gong, Gao Yang
exaly
Flow behaviour of thin polymer films used for hot embossing lithography
Microelectronic Engineering, 2000L J Heyderman, H Schift, J Gobrecht
exaly
Recovery behavior of thermoplastic polymers in micro hot embossing process
Journal of Materials Processing Technology, 2017Jin Wang, Peiyun Yi, Yujun Deng
exaly