Results 1 to 10 of about 88 (75)

Effect of lapping temperature on performance of hydrophilic fixed abrasive pad

Jin'gangshi yu moliao moju gongcheng, 2020
The rise of lapping temperature causes a change in the modulus of the resin matrix, thereby affecting the processing performance of the hydrophilic fixed abrasive pad.The transient temperature field of hydrophilic fixed abrasive pad at different slurry ...
ZHANG Jiaqian, SHEN Gongming, TANG Chao, ZHU Yongwei   +3 more
doaj  

Investigation on pad′s conditioning technology and improving self-conditioning of fixed abrasive pad

Jin'gangshi yu moliao moju gongcheng, 2017
The surface features of abrasive pad deform during chemical mechanical polishing and as a result the polishing ability of the pad is dramatically reduced.Pad conditioning improves the pad surface profile and consequently the wafer profile.In addition,it ...
JU Zhilan, ZHU Yongwei, ZHANG Fubao
doaj  

Influence of slurry on lapping SiC workpiece by using fixed abrasives

Jin'gangshi yu moliao moju gongcheng, 2018
For efficient and stable machining the SiC workpiece, slurries containing SiC particles are used to assist precision lapping SiC with hydrophilic fixed abrasive pad.
JIN Zhenhong, ZHU Yongwei, MO Honglei, WANG Zikun   +3 more
doaj  

Parameter optimization of sapphire wafer lapping with fixed abrasive pad

Jin'gangshi yu moliao moju gongcheng, 2016
In order to meet the requirements of the high processing efficiency and low damage of sapphire wafer,hydrophilic fixed abrasive lapping technology was adopted.The effects of silicon carbide particle size in matrix,matrix types,diamond particle size and ...
ZHENG Fangzhi, ZHU Yongwei, ZHU Nannan, WANG Kai, SHEN Qi   +4 more
doaj  

Process Parameter Modeling and Optimization of Abrasive Water Jet Dressing Fixed-Abrasive Pad Based on Box-Behnken Design. [PDF]

Materials (Basel), 2022
Wang Z, Wang S, Ding Y, Yang Y, Ma L, Pang M, Han J, Su J.   +7 more
europepmc   +1 more source

Effect of Abrasive Grain Concession on Micromechanical Behavior of Lapping Sapphire by FAP. [PDF]

Micromachines (Basel), 2022
Xu H, Wang J, Xu Y, Li Q, Jiang B.
europepmc   +1 more source

Enhancement of the Bond Strength and Reduction of Wafer Edge Voids in Hybrid Bonding. [PDF]

Micromachines (Basel), 2022
Kim YS, Nguyen TH, Choa SH.
europepmc   +1 more source

Surface Transformation of Spin-on-Carbon Film via Forming Carbon Iron Complex for Remarkably Enhanced Polishing Rate. [PDF]

Nanomaterials (Basel), 2022
Lee JM, Lee JC, Kim SI, Lee SJ, Bae JY, Park JH, Park JG.   +6 more
europepmc   +1 more source

Polymer link breakage of polyimide-film-surface using hydrolysis reaction accelerator for enhancing chemical-mechanical-planarization polishing-rate. [PDF]

Sci Rep, 2022
Jeong GP, Park JS, Lee SJ, Kim PS, Han MH, Hong SW, Kim ES, Park JH, Choo BK, Kang SB, Park JG.   +10 more
europepmc   +1 more source

In Vivo Safety of New Coating for Biodegradable Magnesium Implants. [PDF]

Materials (Basel), 2023
Dryhval B, Husak Y, Sulaieva O, Deineka V, Pernakov M, Lyndin M, Romaniuk A, Simka W, Pogorielov M.   +8 more
europepmc   +1 more source