Results 101 to 110 of about 1,420,538 (112)
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Effect of chemical additive on fixed abrasive pad self-conditioning in CMP

International Journal of Advanced Manufacturing Technology, 2016
Dunwen Zuo, Yongwei Zhu
exaly  

Pattern Optimization for Phyllotactic Fixed Abrasive Pads Based on the Trajectory Method

IEEE Transactions on Semiconductor Manufacturing, 2017
Zhongwei Hu, Zhao zaixing, Congfu Fang
exaly  

Effect of process parameters on fixed abrasive pad self-conditioning in micro/nano machining

Integrated Ferroelectrics, 2017
Dunwen Zuo, Yongwei Zhu, Chengxu Hua
exaly  

Performance on lapping quartz glass by UV curing fixed abrasive pad with GrO-diamond composite abrasives

Materials Science in Semiconductor Processing
Wang Zhankui, Lijie Ma, Hongyuan Zhao
exaly  

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