Results 221 to 230 of about 80,951 (262)
Some of the next articles are maybe not open access.

A two‐temperature model of the inductively coupled rf plasma

Journal of Applied Physics, 1987
Pierre Proulx   +2 more
exaly  

Inductively coupled plasma etching of GaN

Applied Physics Letters, 1996
Stephen Pearton   +2 more
exaly  

High-density plasma mode of an inductively coupled radio frequency discharge

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1991
Jayr Amorim
exaly  

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