Results 221 to 230 of about 80,951 (262)
Some of the next articles are maybe not open access.
Mass Spectrometric Evidence for Suprathermal Ionization in an Inductively Coupled Argon Plasma
Applied Spectroscopy, 1981Velmer A Fassel, Robert S Houk
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A two‐temperature model of the inductively coupled rf plasma
Journal of Applied Physics, 1987Pierre Proulx +2 more
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Inductively coupled plasma etching of GaN
Applied Physics Letters, 1996Stephen Pearton +2 more
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High-density plasma mode of an inductively coupled radio frequency discharge
Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1991Jayr Amorim
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Analytic model of power deposition in inductively coupled plasma sources
Journal of Applied Physics, 1995Rognlien T D
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