Results 301 to 310 of about 125,253 (313)
Some of the next articles are maybe not open access.
Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma
Applied Physics Letters, 2010Hyo-Chang Lee +2 more
exaly
Inductively Coupled Plasma Spectrometry
2003Stephen Hill, Mark Cave, Andrew Fisher
openaire +1 more source
Inductively coupled plasma. Optical emission spectroscopy
Analytical Chemistry, 1974Velmer A. Fassel, Richard N. Kniseley
openaire +1 more source
Power deposition in high‐density inductively coupled plasma tools for semiconductor processing
Physics of Plasmas, 1995E F Jaeger, J S Tolliver, D B Batchelor
exaly

