Results 301 to 310 of about 125,253 (313)
Some of the next articles are maybe not open access.

Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasma

Applied Physics Letters, 2010
Hyo-Chang Lee   +2 more
exaly  

Inductively Coupled Plasma Spectrometry

2003
Stephen Hill, Mark Cave, Andrew Fisher
openaire   +1 more source

Inductively coupled plasma. Optical emission spectroscopy

Analytical Chemistry, 1974
Velmer A. Fassel, Richard N. Kniseley
openaire   +1 more source

Power deposition in high‐density inductively coupled plasma tools for semiconductor processing

Physics of Plasmas, 1995
E F Jaeger, J S Tolliver, D B Batchelor
exaly  

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