Results 281 to 290 of about 125,253 (313)
Some of the next articles are maybe not open access.
Mass Spectrometric Evidence for Suprathermal Ionization in an Inductively Coupled Argon Plasma
Applied Spectroscopy, 1981Robert S Houk, Velmer A Fassel
exaly
A two‐temperature model of the inductively coupled rf plasma
Journal of Applied Physics, 1987Javad Mostaghimi +2 more
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Design of Inductively Coupled Plasma
Industrial & Engineering Chemistry Process Design and Development, 1968D. R. Armstrong, W. E. Ranz
openaire +1 more source
Inductively coupled plasma etching of GaN
Applied Physics Letters, 1996R J Shul, D J Rieger, S J Pearton
exaly
High-density plasma mode of an inductively coupled radio frequency discharge
Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1991J Amorim
exaly
Analytic model of power deposition in inductively coupled plasma sources
Journal of Applied Physics, 1995M A Lieberman, T D Rognlien
exaly

