Results 281 to 290 of about 125,253 (313)
Some of the next articles are maybe not open access.

A two‐temperature model of the inductively coupled rf plasma

Journal of Applied Physics, 1987
Javad Mostaghimi   +2 more
exaly  

Design of Inductively Coupled Plasma

Industrial & Engineering Chemistry Process Design and Development, 1968
D. R. Armstrong, W. E. Ranz
openaire   +1 more source

Inductively coupled plasma etching of GaN

Applied Physics Letters, 1996
R J Shul, D J Rieger, S J Pearton
exaly  

High-density plasma mode of an inductively coupled radio frequency discharge

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1991
J Amorim
exaly  

Analytic model of power deposition in inductively coupled plasma sources

Journal of Applied Physics, 1995
M A Lieberman, T D Rognlien
exaly  

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