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Inductively Coupled Plasmas (ICPs)
2003Inductively Coupled Plasmas are so called because the RF electric field is induced in the plasma by an external antenna. ICPs have two main advantages: 1) no internal electrodes are needed as in capacitively coupled systems, and 2) no dc magnetic field is required as in ECR reactors.
Francis F. Chen, Jane P. Chang
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Coupling Characteristics of Induction Coil in Atmospheric Pressure Inductively Coupled Plasmas
IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science, 2005Summary form only given. The coupling characteristics between induction coil and radio frequency (RF) discharges generated by inductively coupled plasma technique (ICP) at the initial start-up phase in near atmospheric pressure range is investigated experimentally.
M. A. Razzak, S. Takamura, Y. Uesugi
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Journal of Analytical Atomic Spectrometry, 1988
Investigations were directed at the development of a He inductively coupled plasma (ICP) ionisation source for inductively coupled plasma mass spectrometry (ICP-MS). Earlier results, exhibiting simpler plasma gas mass spectral features coupled with higher sensitivities for high ionisation energy elements, indicated promise for this source as a ...
David W. Koppenaal, Leslie F. Quinton
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Investigations were directed at the development of a He inductively coupled plasma (ICP) ionisation source for inductively coupled plasma mass spectrometry (ICP-MS). Earlier results, exhibiting simpler plasma gas mass spectral features coupled with higher sensitivities for high ionisation energy elements, indicated promise for this source as a ...
David W. Koppenaal, Leslie F. Quinton
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Review of inductively coupled plasmas for plasma processing
Plasma Sources Science and Technology, 1992The need for large-area, high-density plasma sources for plasma-aided manufacturing of integrated circuits has created a renewed interest in inductively coupled plasmas (ICPs). Several ICP reactor geometries are briefly reviewed. Typically, inductive coupling of RF power (0.5-28 MHz) can produce ion densities in excess of 1012 cm-3 even at submillitorr
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Induction-Coupled Plasma Torch
Journal of Applied Physics, 1961A new method of generating a stable plasma at atmospheric pressure using inductive coupling at a frequency of several Mc is described. Methods of starting and operating this plasma in argon, and mixtures of argon with helium, hydrogen, oxygen, and air are discussed.
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Journal of Analytical Atomic Spectrometry, 1992
An audio-frequency peak in noise power spectra of signals from emission and mass spectrometers, which use an inductively coupled plasma (ICP) as a source, has been associated by a number of workers with instability at the boundary of the plasma plume where it enters the surrounding atmosphere at the mouth of the torch.
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An audio-frequency peak in noise power spectra of signals from emission and mass spectrometers, which use an inductively coupled plasma (ICP) as a source, has been associated by a number of workers with instability at the boundary of the plasma plume where it enters the surrounding atmosphere at the mouth of the torch.
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Inductively coupled plasma—atomic emission spectrometry
1987Optical emission spectrometry is a well proven analytical technique, in widespread use for the last 30 to 40 years. However, early devices available as optical emission sources (arc, spark or dc electrical discharges) had a number of disadvantages that prevented their widespread use for fully quantitative analysis of silicate samples.
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Capillary Electrophoresis-Inductively Coupled Plasma Mass Spectrometry
2016During the recent years, capillary electrophoresis (CE) has been fully established as a powerful tool in separation sciences as well as in element speciation. This road of success is based on the rapid analysis time, low sample requirements, high separation efficiency, and low operating costs of CE. Inductively coupled plasma mass spectrometry (ICP-MS)
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