Results 271 to 280 of about 237,124 (302)
Some of the next articles are maybe not open access.

Design of Inductively Coupled Plasma

Industrial & Engineering Chemistry Process Design and Development, 1968
D. R. Armstrong, W. E. Ranz
openaire   +1 more source

A two‐temperature model of the inductively coupled rf plasma

Journal of Applied Physics, 1987
Javad Mostaghimi, Pierre Proulx
exaly  

Inductively coupled plasma etching of GaN

Applied Physics Letters, 1996
Stephen J Pearton
exaly  

High-density plasma mode of an inductively coupled radio frequency discharge

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1991
Jayr Amorim
exaly  

Analytic model of power deposition in inductively coupled plasma sources

Journal of Applied Physics, 1995
Michael A Lieberman
exaly  

Matrix effects in inductively coupled plasma mass spectrometry: A review

Analytica Chimica Acta, 2011
Christian Agatemor, Diane Beauchemin
exaly  

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