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Investigation of the mechanism of titanium silicide reaction using ion-beam-assisted deposition
Applied Physics Letters, 1999Baik Hong Koo +2 more
exaly
Ion assisted selective deposition of thin films
Microelectronics Reliability, 1990openaire +1 more source
Ion-assisted thin film deposition and applications
Microelectronics Reliability, 1987openaire +1 more source
Room-temperature deposition of indium tin oxide thin films with plasma ion-assisted evaporation
Thin Solid Films, 1998exaly