Results 211 to 220 of about 116,428 (267)
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Ion beam mixing by focused ion beam
Journal of Applied Physics, 2007Si amorphous (41 nm)/Cr polycrystalline (46 nm) multilayer structure was irradiated by 30 keV Ga+ ions with fluences in the range of 25−820 ions∕nm2 using a focused ion beam. The effect of irradiation on the concentration distribution was studied by Auger electron spectroscopy depth profiling, cross-sectional transmission electron microscopy, and ...
Árpád Barna +7 more
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Nature, 2001
By freezing out the motion between particles in a high-energy storage ring, it should be possible to create threads of ions, offering research opportunities beyond the realm of standard accelerator physics. The usual heating due to intra-beam collisions should completely vanish, giving rise to a state of unprecedented brilliance.
Schätz, Tobias +2 more
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By freezing out the motion between particles in a high-energy storage ring, it should be possible to create threads of ions, offering research opportunities beyond the realm of standard accelerator physics. The usual heating due to intra-beam collisions should completely vanish, giving rise to a state of unprecedented brilliance.
Schätz, Tobias +2 more
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Ion beam deposition and in-situ ion beam analysis
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1992The direct deposition in thin films and the production of very shallow junctions by ultralow energy ion implantation involves the interaction of ions with only the outermost surface layers of a solid. Quantitative structural and composition analysis of the grown or implanted layers requires the use of techniques with extremely high depth resolution.
A.H. Al-Bayati +4 more
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Electron beam ion source and electron beam ion trap (invited)
Review of Scientific Instruments, 2010The electron beam ion source (EBIS) and its trap variant [electron beam ion trap (EBIT)] celebrated their 40th and 20th anniversary, respectively, at the EBIS/T Symposium 2007 in Heidelberg. These technologically challenging sources of highly charged ions have seen a broad development in many countries over the last decades.
Reinard, Becker, Oliver, Kester
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Ion-beam channeling in a quasicrystal
Physical Review B, 1992We have observed ion-beam channeling in a quasicrystal. For 1-MeV He-4+ ions in icosahedral Al-Cu-Fe the maximum effect found is 36%. The full width at half maximum of the observed dips is 1.3-degrees. The effect persists up to great depths (> 200 nm), thus showing a high degree of ordering in this phase.
VANVOORTHUYSEN, EHD +4 more
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Ion recombination correction in carbon ion beams
Medical Physics, 2016Purpose:In this work, ion recombination is studied as a function of energy and depth in carbon ion beams.Methods:Measurements were performed in three different passively scattered carbon ion beams with energies of 62 MeV/n, 135 MeV/n, and 290 MeV/n using various types of plane‐parallel ionization chambers.
S, Rossomme +8 more
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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, 1995
The measurement of resist image size using a finely focused ion beam (FIB) is described. Comparisons of FIB and scanning electron microscope (SEM) measurements of resist features are presented. The short penetration range of an ion relative to an electron is shown to offer fundamental advantages for critical dimension metrology.
A. Wagner +3 more
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The measurement of resist image size using a finely focused ion beam (FIB) is described. Comparisons of FIB and scanning electron microscope (SEM) measurements of resist features are presented. The short penetration range of an ion relative to an electron is shown to offer fundamental advantages for critical dimension metrology.
A. Wagner +3 more
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Ion-beam-induced amorphization
Materials Science and Engineering, 1987Abstract Ion beams are capable of inducing the formation of metastable amorphous phases in metallic systems, depending on the coupling between irradiation conditions, namely temperature, implanted species, energy and fluence, and target characteristics such as constituents, stoichiometry and structure.
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