Results 271 to 280 of about 154,212 (298)
Some of the next articles are maybe not open access.

Ca and O ion implantation doping of GaN

Applied Physics Letters, 1996
Stephen J Pearton
exaly  

Ion Implantation

2016
J. Wood, Gautam Majumdar
openaire   +1 more source

Recent developments and applications of plasma immersion ion implantation

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 2004
Paul K Chu
exaly  

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