Results 291 to 298 of about 154,212 (298)

Plasma immersion ion implantation for semiconductor processing

Materials Chemistry and Physics, 1996
exaly  

Ion Implantation

2007
Michael Ameen, Ivan Berry, Walter Class, Hans-Joachim Gossmann, Leonard Rubin   +4 more
openaire   +1 more source

Impact of Sequential N Ion Implantation on Extended Defects and Mg Distribution in Mg Ion‐Implanted GaN

Physica Status Solidi - Rapid Research Letters
Emi Kano, Jun Uzuhashi, Tetsuo Narita
exaly  

Ion implantation in semiconductors—Part I: Range distribution theory and experiments

Proceedings of the IEEE, 1968
exaly  

Ion Implantation

2001
openaire   +1 more source

Ion Implantation

2008
openaire   +1 more source

ION IMPLANTATION

1971
Davidson, S.M., Booker, G.R., Bicknell, R.W., Allen, R.M., Hart, R.R., Marsden, D.A., Whitton, J.L., Masters, B.J., Fairfield, J.M., Crowder, B.L., Title, R.S., Brice, D.K., Westmoreland, J.E., Sigmund, P.   +13 more
openaire   +2 more sources

Ion Implantation

1976
openaire   +1 more source