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Ion sources for ion machining applications

12th International Electric Propulsion Conference, 1976
Ion sources with beam diameters of 2.5, 10, and 20 cm have been developed for ion machining applications. All three of these sources use carbon grids to minimize accelerator grid sputtering. A new starting circuit Is also employed that uses only passive components for initiation of the discharge. The two larger sources use a flat multipole chamber with
Harold R. Kaufman   +2 more
openaire   +1 more source

Ion implantation technology and ion sources

Review of Scientific Instruments, 2014
Ion implantation (I/I) technology has been developed with a great economic success of industries of VLSI (Very Large-Scale Integrated circuit) devices. Due to its large flexibility and good controllability, the I/I technology has been assuming various challenging requirements of VLSI evolutions, especially in advanced evolutional characteristics of ...
openaire   +2 more sources

RF Negative Ion Sources and Polarized Ion Sources

2016
The requirement of a neutral beam injection system with hydrogen or deuterium beam energy up to 1 MeV for the ITER project has recently triggered new research on negative ion sources, from production to acceleration and neutralization before the injection in the tokamak.
N. Ippolito   +4 more
openaire   +1 more source

Analysis of magnetron ion sources and PIG ion sources

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
Abstract Magnetron ion sources and PIG ion sources are sources of intense negative ion beams and multiply-charged positive and negative ion beams. They are composed of two electrodes, a sheath and a plasma. The author has classified them into magnetron (MG), inverse magnetron (IM), planar magnetron and Penning ionization gauge (PIG) ion sources.
openaire   +1 more source

ION SOURCE

2021
BAJIC STEVE   +2 more
openaire   +5 more sources

Vacuum Arc Ion Sources

Review of Scientific Instruments, 1994
Ian G Brown
exaly  

Liquid Metal Alloy Ion Sources—An Alternative for Focussed Ion Beam Technology

Applied Physics Reviews, 2016
Lars Bruchhaus   +2 more
exaly  

High Brightness Inductively Coupled Plasma Source for High Current Focused Ion Beam Applications

Journal of Vacuum Science & Technology B, 2006
A Aanesland, R W Boswell
exaly  

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