Results 201 to 210 of about 566,568 (257)

Ion implantation technology and ion sources

Review of Scientific Instruments, 2014
Ion implantation (I/I) technology has been developed with a great economic success of industries of VLSI (Very Large-Scale Integrated circuit) devices. Due to its large flexibility and good controllability, the I/I technology has been assuming various challenging requirements of VLSI evolutions, especially in advanced evolutional characteristics of ...
openaire   +2 more sources

RF Negative Ion Sources and Polarized Ion Sources

2016
The requirement of a neutral beam injection system with hydrogen or deuterium beam energy up to 1 MeV for the ITER project has recently triggered new research on negative ion sources, from production to acceleration and neutralization before the injection in the tokamak.
N. Ippolito, F. Taccogna, P. Minelli, V. Variale, N. Colonna   +4 more
openaire   +1 more source

Analysis of magnetron ion sources and PIG ion sources

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 1989
Abstract Magnetron ion sources and PIG ion sources are sources of intense negative ion beams and multiply-charged positive and negative ion beams. They are composed of two electrodes, a sheath and a plasma. The author has classified them into magnetron (MG), inverse magnetron (IM), planar magnetron and Penning ionization gauge (PIG) ion sources.
openaire   +1 more source

A new off-line ion source facility at IGISOL

Nuclear Instruments & Methods in Physics Research B, 2020
Markus Vilen, Ari Jokinen, Sarina Geldhof   +2 more
exaly  

New high current low energy ion source

Journal of Vacuum Science & Technology an Official Journal of the American Vacuum Society B, Microelectronics Processing and Phenomena, 1987
Aoyagi Y, Namba S
exaly  

Ion Source Electronics and Microwave Generators for Ion Sources

2017
H. Horneff, F. Bourg
openaire   +1 more source

Ion source

Vacuum, 1954
C.F. Barnett, C.B. Mills
openaire   +1 more source

ION SOURCE

2021
openaire   +3 more sources

Structure design and analysis of RF ion source for negative ion source test facility

Review of Scientific Instruments, 2019
Caichao Jiang, Yongjian Xu, Yahong Xie   +2 more
exaly  

ION SOURCE ADAPTER

2020
SAGAWA HITOSHI, SASAKI KAZUNORI
openaire   +2 more sources