Recent Advances in Plasma‐Enhanced Atomic Layer Etching for Next‐Generation Nanofabrication
Continued semiconductor miniaturization demands atomic‐scale patterning and ultralow surface roughness beyond the capabilities of conventional reactive ion etching. This review highlights advances in isotropic and anisotropic plasma‐enhanced atomic layer etching since 2020, covering fundamental mechanisms, applications across major semiconductor ...
Shih‐Nan Hsiao
wiley +1 more source
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Hensel ME +4 more
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Di Meo I, Anikster Y, Tiranti V, Iuso A.
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Loss of zinc from zinc-biofortified rice and conventional rice varieties due to various cooking techniques practiced in rural Bangladesh. [PDF]
Mondal P +8 more
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Iron deficiency without anemia: An underrecognized and undertreated clinical condition with special focus on colorectal cancer. [PDF]
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Maghareh M +6 more
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