Lead Zirconate-Lead Titanate (PZT) Ceramics From Organic-Derived Precursors
MRS Proceedings, 1984ABSTRACTOrganic-derived precursors can facilitate the preparation of PZT ceramics, particularly in the areas of processing and batch reproducibility. The use of partially alkoxide-derived precursors and completely organic-derived precursors has been studied.
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An Ultrasound Transducer by Lead Zirconate Titanate (PZT) Nanofibers
Volume 7: 5th International Conference on Micro- and Nanosystems; 8th International Conference on Design and Design Education; 21st Reliability, Stress Analysis, and Failure Prevention Conference, 2011In this paper, we demonstrate Lead zirconate titanate (PZT) nanofibers as a transducer to generate and detect ultrasound acoustic waves. PZT nanofibers with average diameter of 102nm were fabricated by the electrospinning method. The as-fabricated nanofibers were collected and aligned across a 10 μm silicon trench with Au electrodes.
Guitao Zhang, Yong Shi
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Pyroelectricity versus conductivity in soft lead zirconate titanate (PZT) ceramics
Journal of Materials Research, 2007The electrical behavior of modified soft lead zirconate titanate (PZT) ceramics has been studied as a function of temperature at different direct current (dc) electric fields and grain sizes. As ferroelectrics, such as PZT, are highly polarizable materials, poling, depolarization, and electric conduction contribute to the total electrical current ...
Kamel, T.M., With, de, G.
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Raman analysis of microcircuits with lead zirconate titanate (PZT) films
Proceedings, annual meeting, Electron Microscopy Society of America, 1992Certain compositions and structural forms of lead zirconate titanate (PZT) materials have potential applications in microelectronics because of their ferroelectric properties. One such application is in the development of new types of non-volatile memories. PZT films are integrated into microcircuit components using sol-gel deposition techniques.
D. R. Tallant +4 more
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Growth and characterization of lead zirconate titanate (PZT) thin films
Optics and Precision Engineering, 2013This paper explores how to prepare the Pb(Zrx Ti1-x)O3(PZT)thin films by using the solgel method on a silicon substrate,then it tests the film characteristics by different methods.The solution with different compositions and proportions is designed according to the molecular formulas,and then the solution is coated on Titanium(Ti)or Platinum/Titanium ...
Zhang, Yi +4 more
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Fabrication of Piezoelectric Diaphragm Using Lead Zirconate Titanate (PZT) Films
MRS Proceedings, 2001AbstractPiezoelectric diaphragms were fabricated using bulk micromachining. The diaphragms had a unimorph structure, where Pb(Zr0.52Ti0.48)O3 (PZT) and thermally grown silicon oxide (SiO2) films were used as the active and passive layers, respectively. To actuate the diaphragms, two modes were designed: d31 and d33-mode.
E. Hong +3 more
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Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films
Microsystem Technologies, 2012The design, fabrication and measuring of piezoelectric micromachined ultrasonic transducers (pMUTs), including the deposition and patterning of PZT films, was investigated. The (100) preferential orientation of PZT film have been deposited on Pt/Ti/SiO2/Si (100) substrates by modified sol–gel method. PZT film and Pt/Ti electrode were patterned by novel
Junhong Li +3 more
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Measurement of Young's Moduli for Lead Zirconate Titanate (PZT) Ceramics
Journal of Testing and Evaluation, 2000Abstract Knowledge of the Young's moduli is necessary for piezoelectric ceramics in order to separate the total deformation into an elastic and a plastic contribution. The methods for the determination of the Young's moduli, well known from conventional ceramics, are much more complicated due to the special electrical boundary conditions.
Fett, Theo, Munz, Dietrich
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Cylindrical Micro Ultrasonic Motor Utilizing Bulk Lead Zirconate Titanate (PZT)
Japanese Journal of Applied Physics, 1999Ultrasonic motors are expected to be used as microactuators because of their high torque, low speed and simple construction. We have already reported cylindrical-shaped micro ultrasonic motors which utilized a lead zirconate titanate (PZT) thin film. In this paper, we discuss a micro ultrasonic motor composed of bulk PZT.
T. Morita, M. K. Kurosawa, T. Higuchi
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Lead zirconate titanate (PZT) film capacitor with a multilayer construction
Proceedings of the IEEE 1998 National Aerospace and Electronics Conference. NAECON 1998. Celebrating 50 Years (Cat. No.98CH36185), 2002Thin PZT film is being developed for use in microelectronics, electromechanical and optoelectronic applications. Thin Pb(ZrTi)O/sub 3/ film capacitor devices were fabricated using RF sputtering techniques. The multiple-layer configuration of Si/SiO/sub 2//Ti/Pd or Pt was used as the substrate and bottom electrode. The top electrode was either Pd or Pt.
null Bang-Hung Tsao +2 more
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