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Suppressed Fin-LER Induced Variability in Negative Capacitance FinFETs
IEEE Electron Device Letters, 2017Pin Su, Ho-Pei Lee
exaly
The mechanism underlying Ler-mediated alleviation of gene repression by H-NS
Biochemical and Biophysical Research Communications, 2017Minsang Shin
exaly
How to measure a-few-nanometer-small LER occurring in EUV lithography processed feature
2018Masami Ikota +2 more
exaly