Results 201 to 210 of about 9,926 (249)

Linewidth measurement of gratings on photomasks: a simple technique

Applied Optics, 1992
A novel laser scatterometer linewidth measurement tool has been developed for critical dimension metrology of photomasks. Calculation of the linewidth is based on a rigorous theoretical model, thus eliminating the need for calibrations. In addition the effect of the glass substrate on which the photomask grating is placed is explicitly taken into ...
S Sohail H Naqvi, John Robert Mcneil, J R Mcneil   +2 more
exaly   +3 more sources

Measurement of Lorentzian linewidths

Nuclear Instruments and Methods, 1975
Abstract A new method is presented for the least-squares analysis of pulse height spectra from semiconductor detector-multichannel analyser systems, which does not involve the procedure of matching exponential tails onto Gaussian functions. We show that for a particular set of data taken at the Rutherford Laboratory the use of two Gaussian functions,
B.L. Roberts, R.A.J. Riddle, G.T.A. Squier   +2 more
openaire   +1 more source

Laser-linewidth measurement with a Fizeau wavemeter

Optics Letters, 1988
It is shown theoretically and experimentally that a Fizeau wedge wavemeter typically used to measure laser wavelength can also be used to measure the linewidth of a pulsed or cw laser. Linewidths as small as a few hundred megahertz can be measured by choosing the thickness of the wedge properly.
C, Reiser, P, Esherick, R B, Lopert
openaire   +2 more sources

Submicron linewidth measurement for VLSI

Proceedings, annual meeting, Electron Microscopy Society of America, 1988
For several years, SEM-based inspection and measurement has been a necessary tool for in-process IC characterization. SEM inspection phenomena are now well understood due to sample-beam interaction modeling, instrument calibration using a NBS standard, and years of experience in low voltage applications.
Marylyn Hoy Bennett, H. Shannon Lilley
openaire   +1 more source

Laser diode linewidth measurements

Proceedings of 2003 5th International Conference on Transparent Optical Networks, 2003., 2004
A spectrum of laser diode radiation forms a qualitative criterion of the laser diode applicability as a fiber telecommunications source. Hence, there is need to measure/estimate its spectral linewidth. Having a few different commercial laser sources at the range of third telecommunication window we developed laser linewidth measurements.
K.M. Abramski, W. Rodzen, P.R. Kaczmarek, L. Czurak, A. Budnicki   +4 more
openaire   +1 more source

Intensity-Correlation Linewidth Measurement

Physical Review, 1967
The optical intensity correlation technique developed by Hanbury Brown and Twiss has been used to measure the linewidth of 4358-\AA{} light from a mercury discharge lamp which was filtered with a Fabry-Perot interferometer. A time-to-height converter was used to convert the delay spectrum of photoelectric counts to a pulse-height spectrum which was ...
David T. Phillips, Herbert Kleiman, Sumner P. Davis   +2 more
openaire   +1 more source

The use of S.E.M. for linewidth measurements

Microelectronic Engineering, 1987
Abstract By studying the cross-section of the lines to be measured we show that the absolute measurement of Critical Dimension is not provided by S.E.M. dedicated to metrological applications. A calibration for each layer is needed.
Daniel Burlet, Herve Martin
openaire   +1 more source

Microwave Spectrograph for Linewidth Measurements

Review of Scientific Instruments, 1965
A microwave spectrograph designed for measurements of linewidth is described. The width spectrograph consists of the same general major components as a spectrograph for frequency measurements, but differs considerably in the requirements of the components and the assembly thereof since many factors which have virtually no effect on the frequency of a ...
Edgar A. Rinehart, Robert L. Legan, Chun C. Lin   +2 more
openaire   +1 more source

Self-homodyne Laser Linewidth Measurements

Conference on Lasers and Electro-Optics Europe, 1996
Accurate knowledge of the laser linewidth is essential for many applications in coherent optical communication, optical metrology and high-resolution spectroscopy. The self-heterodyne/homo-dyne measurement technique is an established method for measuring the linewidth of semiconductor lasers [1, 2].
Hanne Ludvigsen, Jukka Kokkonen, Mika Tossavainen, Matti Kaivola   +3 more
openaire   +2 more sources

Measurement of the ferromagnetic-resonance linewidth

Measurement Techniques, 1978
The errors are associated with the selection of the quantities to be measured directly, which enter into the formulas to evaluate 2AH. In [4], for instance, these quantities are the passband of the first peak of the resonance curve of the coupled ferrite-cavity system and the passband of the loaded cavity.
V. A. Tabarin, S. D. Dem'yantseva
openaire   +1 more source