Results 241 to 250 of about 2,390,699 (275)

Device for Measuring Spectral Linewidths

Applied Spectroscopy, 1967
Conventional methods of microphotometry measure the portion of an incident beam of light that is transmitted through a given spectral line on a photographic film or plate. This percentage transmittance is, in effect, a measure of the density of the line; for density is equal to the logarithm of the reciprocal of the transmittance.
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Influence of focus variation on linewidth measurements

SPIE Proceedings, 2005
The influence of spatial resolution on linewidth measurements in the critical dimension scanning electron microscope (CD-SEM) was investigated experimentally. Measurement bias variation and measurement repeatabilities of four edge detection algorithms were evaluated with a series of images at varying focus in order to determine the effect of resolution
Maki Tanaka, John S. Villarrubia, Andras E. Vladar   +2 more
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Comparison of linewidth measurements on COG masks

SPIE Proceedings, 2001
We report on comparison measurements for linewidths of test structures on chrome on glass photomasks by means of different types of light optical transmission microscopy and low voltage scanning electron microscopy (LVSEM). The investigated linewidth or critical dimension range was chosen to be between 0.3 micrometers and 5 micrometers on isolated and ...
Harald Bosse, Werner Mirande, Carl G. Frase, Hans-Juergen Brueck, Sigrid Lehnigk   +4 more
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Linewidth Measurement By Low Voltage SEM

SPIE Proceedings, 1988
The reduction of integrated circuit dimensions to the submicron range has necessitated the use of low voltage scanning electron microscopy (SEM) for linewidth metrology 1,2. SEM offers advantages of higher resolution and increased depth of focus relative to optical linewidth measurement systems. Low voltage SEM offers a nondestructive method to acquire
Bhanwar Singh, William H. Arnold
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New Technique For Submicron Linewidth Measurement

SPIE Proceedings, 1988
We propose a novel technique to accurately measure submi-cron linewidths on photomasks and wafers. We do this by translating a phase-shifting mask across the surface containing the line whose width we wish to measure. With a Fourier-transform lens, we detect the intensity of the zero-order spatial component of the light coming from the surface as a ...
Yiping Xu, Alan Mar, Glen Wade, Evelyn Hu, John Landry   +4 more
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Rayleigh linewidth measurements in liquid helium

Journal of Low Temperature Physics, 1977
A small-angle intensity fluctuation spectrometer has been constructed and used to measure the width Γ of the Rayleigh component of 514.5-nm light scattered from liquid helium. The techniques utilized to maximize the weak scattered signal are described.
E. A. Lazarus, N. C. Ford, R. B. Hallock, K. H. Langley   +3 more
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Improved Accuracy For SEM Linewidth Measurements

SPIE Proceedings, 1987
The diminishing size of VLSI features necessitates the use of a scanning electron microscope (SEM) for making inprocess CD measurements. The intent of this paper is to establish a methodology for improving the accuracy and precision of such measurements.
D. K. Atwood, D. C. Joy
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Linewidth Measurements of Mercury's Alkali Exosphere

Sunlight can shape elements in Mercury’s thin atmosphere into an escaping cometlike tail. Solar photons are absorbed from one direction—the Sun—and scatter isotropically, imparting a net momentum in the anti-sunward direction.
Patrick Lierle, Carl Schmidt, Emma Lovett   +2 more
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Linewidth measurement on a 140 GHz gyrotron

16th International Conference on Infrared and Millimeter Waves, 1991
The linewidth of a single 140 GHz gyrotron pulse has been measured using a time domain sampling technique. A spectral resolution of 60 kHz could be achieved, whereas the pulse length of the gyrotron did not exceed 600 μs. The paper describes the measurement set-up and preliminary results are presented.
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Phonon linewidths measured by neutron scattering

Physics Today, 1973
Two Brookhaven experimenters, John D. Axe and Gen Shirane, have used inelastic neutron scattering to detect the influence of the superconducting energy gap upon phonon lifetimes in Nb3Sn. Speaking at the January meeting of the American Physical Society in New York, Axe said their results yield estimates of the superconducting energy gap and the size ...
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