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Submicron linewidth measurement for VLSI

Proceedings, annual meeting, Electron Microscopy Society of America, 1988
For several years, SEM-based inspection and measurement has been a necessary tool for in-process IC characterization. SEM inspection phenomena are now well understood due to sample-beam interaction modeling, instrument calibration using a NBS standard, and years of experience in low voltage applications.
Marylyn Hoy Bennett, H. Shannon Lilley
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Intensity-Correlation Linewidth Measurement

Physical Review, 1967
The optical intensity correlation technique developed by Hanbury Brown and Twiss has been used to measure the linewidth of 4358-\AA{} light from a mercury discharge lamp which was filtered with a Fabry-Perot interferometer. A time-to-height converter was used to convert the delay spectrum of photoelectric counts to a pulse-height spectrum which was ...
David T. Phillips   +2 more
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Microwave Spectrograph for Linewidth Measurements

Review of Scientific Instruments, 1965
A microwave spectrograph designed for measurements of linewidth is described. The width spectrograph consists of the same general major components as a spectrograph for frequency measurements, but differs considerably in the requirements of the components and the assembly thereof since many factors which have virtually no effect on the frequency of a ...
Edgar A. Rinehart   +2 more
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The use of S.E.M. for linewidth measurements

Microelectronic Engineering, 1987
Abstract By studying the cross-section of the lines to be measured we show that the absolute measurement of Critical Dimension is not provided by S.E.M. dedicated to metrological applications. A calibration for each layer is needed.
Daniel Burlet, Herve Martin
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Measurement of the ferromagnetic-resonance linewidth

Measurement Techniques, 1978
The errors are associated with the selection of the quantities to be measured directly, which enter into the formulas to evaluate 2AH. In [4], for instance, these quantities are the passband of the first peak of the resonance curve of the coupled ferrite-cavity system and the passband of the loaded cavity.
V. A. Tabarin, S. D. Dem'yantseva
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Quiet Cascade: Measuring QCL Intrinsic Linewidth

Optics and Photonics News, 2010
Absent
Bartalini S   +8 more
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Spatial filtering microscope for linewidth measurements

Applied Optics, 1989
High pass filtering has been relatively little used in microscopy, yet it may have application to linewidth measurement and visualization of phase objects. I have designed and built a spatial filtering microscope entirely of conventional microscope objectives.
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Measurement of Lorentzian linewidths by pulse propagation delay

Physical Review A, 1996
Two related methods for determining the Lorentzian linewidth of oneand two-photon transitions in an atomic medium are presented. In each method, the linewidth is determined by the relationship between the energy transmission and propagation delay of a series of laser pulses sent through the medium; precise knowledge of the laser frequency, atom density,
, Kasapi, , Yin, , Jain, , Harris
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Measurement of carrier lifetime and linewidth enhancement factor for 1.5- mu m ridge-waveguide laser amplifier [PDF]

open access: yesIEEE Photonics Technology Letters, 1991
Semiconductor optical amplifiers are used for investigation of the effective carrier lifetime and the linewidth enhancement factor. Contrary to semiconductor lasers, semiconductor optical amplifiers allow measurement at high levels of injected carrier ...
B Mikkelsen   +2 more
exaly   +2 more sources

Self-homodyne Laser Linewidth Measurements

Conference on Lasers and Electro-Optics Europe, 1996
Accurate knowledge of the laser linewidth is essential for many applications in coherent optical communication, optical metrology and high-resolution spectroscopy. The self-heterodyne/homo-dyne measurement technique is an established method for measuring the linewidth of semiconductor lasers [1, 2].
Hanne Ludvigsen   +3 more
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