Results 121 to 130 of about 151,996 (171)

Proposal of Lithography using LB Film Resist and EBEP Etching.

, 1998
Shinji Ogawa, Girish Phatak, Shinzo Morita   +2 more
openalex   +2 more sources

Design and Fabrication of Microelectrodes for Dielectrophoresis and Electroosmosis in Microsystems for Bio-Applications. [PDF]

Micromachines (Basel)
Wu M, Liu Z, Gao Y.
europepmc   +1 more source

High Resolution EB Lithography on Organic Resists: Molecular Size Effect.

, 1997
Yukinori Ochiai, Shoko Manako, Jun‐ichi Fujita, Eiichi Nomura   +3 more
openalex   +2 more sources

Grayscale Lithography and a Brief Introduction to Other Widely Used Lithographic Methods: A State-of-the-Art Review. [PDF]

Micromachines (Basel)
Khonina SN, Kazanskiy NL, Butt MA.
europepmc   +1 more source

Theoretical and Experimental Study on the Silylation of Alcohol Units in ArF Lithography Resists.

, 1998
Nobuyuki Matsuzawa, Shigeyasu Mori, Masayuki Endo, Taku Morisawa, Yuko Kaimoto, Koichi Kuhara, Masaru Sasago   +6 more
openalex   +2 more sources

Fabrication and application of 3D Terahertz metamaterials with vertical multinanogaps for spectroscopic sensing. [PDF]

Sci Rep
Inomata N, Takahashi T, Sakai Y, Okatani T, Kanamori Y.   +4 more
europepmc   +1 more source

Characterization of tBOC based chemically amplified resist for SR lithography.

, 1997
Teruhiko Kumada, Hiroshi Adachi, Hiroshi Watanabe, Hiroaki Sumitani   +3 more
openalex   +2 more sources

From Printed Devices to Vertically Stacked, 3D Flexible Hybrid Systems. [PDF]

Adv Mater
Liu F, Christou A, Dahiya AS, Dahiya R.
europepmc   +1 more source

Proceedings of the first technical symposium on soft x-ray projection lithography: Video guidebook

, 1990
N M Ceglio
openalex   +1 more source

Dynamic photomask directed lithography based on electrically stimulated nematic liquid crystal architectures. [PDF]

Nat Commun
Liu M, Yang R, Guo Z, Chen K, Feng H, Lu H, Huang S, Zhang M, Ye H, Shui L.   +9 more
europepmc   +1 more source