Results 101 to 110 of about 117,202 (206)

Nanoimprint lithography for scalable electronic and photonic nanomanufacturing. [PDF]

Discov Nano
Chen PT, Huang CC, Lai YW, Lin CH, Lee KY, Li CC, Chang CT, Tsai CJ, Chen LY, Lee PT, Hong YH, Lee TY, Kuo HC.   +12 more
europepmc   +1 more source

The Italian FIRB project on EUV lithography

, 2006
The Italian National Project “FIRB-EUVL” is introduced and discussed. This project includes the realization of a micro-exposure-tool and the up-grading of the National knowledge on EUV-lithography in all its aspects, from plasma sources (both high power ...
Bollanti, S, Letardi, T, RICHETTA, MARIA, Gerardino, A, REALE, ANDREA, Flora, F, Piegari, A, Nicolosi, P, TOMASSETTI, GIUSEPPE, Lisi, N, MARTELLUCCI, SERGIO, Marolo, T, Ritucci, A, Torre, A, Mezi, L, Bonfigli, F, GAUDIO, PASQUALINO, Palladino, L, Conti, A, Zheng, C., Baldacchini, G, Baldesi, A, Tefouet Kana, E, Pelizzo, M, Mattarello, V, Patelli, A, Di Lazzaro, P, Santoni, A, BELLECCI, CARLO, Dikonimos, T, Montereali, R, Sarto, F, Nocerino, G, Nichelatti, E, Rigato, V, Francucci, F, Rydzy, A, Clementi, G, Murra, D, Giorgi, R, Scaramuzzi, F, Krasilnikova, A   +41 more
core  

Editorial for the Special Issue on Recent Advances in Lithography. [PDF]

Micromachines (Basel)
Li S, Wei Y, Zhang H, He J, Peng X.
europepmc   +1 more source

Preventing Plasma-Induced Resist Hardening in Molybdenum Disulfide Transistors via Sacrificial Metal Mask Lithography. [PDF]

Small
Kim D, Zhao Y, Kim S, Lee S, Eom S, Kim TY, Lee HS, Suh J, Kim B, Kim M.   +9 more
europepmc   +1 more source

Nanoimprinted Infrared Metasurface Multispectral Filters for Neural-Network-Assisted Low-Temperature Sensing. [PDF]

Nanophotonics
Yang S, Su Z, Dan Y.
europepmc   +1 more source

Capillary-Driven Flow in Triangular Nanofluidic Channel Fabricated via Nanoimprint Lithography with Heterogeneous Semiconductor Materials. [PDF]

ACS Omega
Wang YH, Lee KY, Lin CH, Cheng CM.
europepmc   +1 more source

A comparative study of air cushion and roll-to-plate pressing in wafer-level nanoimprint lithography. [PDF]

Discov Nano
Yang G, Chen S, Xu B, Deng M, Wang X, Chen X, Hao Z, Ge H.   +7 more
europepmc   +1 more source

Microfluidic Gratings for X-Ray Phase Contrast Imaging. [PDF]

Adv Sci (Weinh)
Rossi A, Ferraro A, Coccimiglio F, Ritacco T, Astolfo A, Giocondo M, Formoso V, Agostino RG, Iacoviello F, Papakonstantinou I, Olivo A.   +10 more
europepmc   +1 more source

Megapixel snapshot hyperspectral imaging with high resolution Fabry-Pérot color filter array. [PDF]

Natl Sci Rev
Chen Y, Huang J, Hu Z, Rong R, Ma Q, Zeng P, Chen J, Tam H, Deng J, Li K, Cheah K, Li G.   +11 more
europepmc   +1 more source

Reliability Analysis of Semiconductor Material Processing for Advanced Integrated Circuit Chip Manufacturing. [PDF]

Micromachines (Basel)
Zhang Y, Jiang S, Zhang D.
europepmc   +1 more source