Results 121 to 130 of about 117,202 (206)

Mechanisms of Film-Formation-Related Defects in EUV Photoresists for Sub-3 nm Nodes and Synergistic Materials-Process-Intelligence Co-Optimization. [PDF]

open access: yesMicromachines (Basel)
Wu J   +12 more
europepmc   +1 more source

Recent efforts of vapour-phase strategies for EUV resist toward high- and hyper-NA extreme ultraviolet lithography. [PDF]

open access: yesChem Sci
Chu TTH   +13 more
europepmc   +1 more source

Metal-Ligand Coordination Enables Molecular Resist-Based Direct Write Lithography of Metal Halides. [PDF]

open access: yesAdv Mater
Sarkar P   +14 more
europepmc   +1 more source

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