Results 161 to 170 of about 151,996 (171)

EUV computational lithography using accelerated topographic mask simulation

Advanced Lithography, 2019
As EUV lithography is getting ready for deployment in high volume manufacturing, lithography engineering focus moves to efficient computational lithography tools (mask correction, verification, source-, mask- and processoptimization) providing optimal ...
V. Domnenko, B. Küchler, W. Hoppe, J. Preuninger, U. Klostermann, W. Demmerle, M. Bohn, D. Krüger, R. Kim, L. E. Tan   +9 more
semanticscholar   +1 more source

Block copolymer lithography: Periodic arrays of ~1011 holes in 1 square centimeter

, 1997
Dense periodic arrays of holes and dots have been fabricated in a silicon nitride–coated silicon wafer. The holes are 20 nanometers across, 40 nanometers apart, and hexagonally ordered with a polygrain structure that has an average grain size of 10 by 10.
Miri Park, C. Harrison, P. Chaikin, R. Register, D. Adamson   +4 more
semanticscholar   +1 more source

Imprint Lithography with 25-Nanometer Resolution

Science, 1996
S. Chou, P. R. Krauss, P. J. Renstrom
semanticscholar   +1 more source

Bio-resin for high resolution lithography-based biofabrication of complex cell-laden constructs

Biofabrication, 2018
K. Lim, R. Levato, P. Costa, M. Castilho, C. Alcala-Orozco, K. V. van Dorenmalen, F. Melchels, D. Gawlitta, G. Hooper, J. Malda, T. Woodfield   +10 more
semanticscholar   +1 more source

Nanofabrication by electron beam lithography and its applications

, 2015
Yifang Chen
semanticscholar   +1 more source

Fabrication of photonic crystals for the visible spectrum by holographic lithography

Nature, 2000
M. Campbell, D. N. Sharp, M. T. Harrison, M. T. Harrison, R. Denning, A. Turberfield   +5 more
semanticscholar   +1 more source

Advanced colloidal lithography: From patterning to applications

Nano Today, 2018
Yandong Wang, Mengyuan Zhang, Y. Lai, L. Chi   +3 more
semanticscholar   +1 more source

Patterning proteins and cells using soft lithography.

Biomaterials, 1999
R. Kane, S. Takayama, E. Ostuni, D. Ingber, G. Whitesides   +4 more
semanticscholar   +1 more source

Soft lithography based on photolithography and two-photon polymerization

Microfluidics and Nanofluidics, 2018
Yang Lin, Can Gao, D. Gritsenko, Ran Zhou, Jie Xu   +4 more
semanticscholar   +1 more source

Mechanical Properties Tunability of Three-Dimensional Polymeric Structures in Two-Photon Lithography

IEEE transactions on nanotechnology, 2017
E. Lemma, F. Rizzi, T. Dattoma, B. Spagnolo, L. Sileo, A. Qualtieri, M. de Vittorio, F. Pisanello   +7 more
semanticscholar   +1 more source