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Formation of symmetrical nanoholes by local droplet etching for site-controlled growth of single quantum dots

2023
В работе представлены результаты экспериментальных исследований процессов локального травления поверхности GaAs(001) каплями Ga при различных технологических режимах. Впервые на поверхности GaAs с ориентацией (001) получены симметричные наноуглубления пирамидальной формы с низкой поверхностной плотностью (~1·10^8 см^-2 и ниже), позволяющие обеспечить ...
Lakhina, Ekaterina   +5 more
openaire   +1 more source

Local droplet etching – Nanoholes, quantum dots, and air-gap heterostructures

AIP Conference Proceedings, 2014
Local droplet etching (LDE) allows the self-organized generation of nanoholes in semiconductor surfaces and is fully compatible with molecular beam epitaxy (MBE). The influence of the process parameters as well as of droplet and substrate materials on the LDE nanohole morphology is discussed.
Ch. Heyn   +5 more
openaire   +1 more source

Experimental study of nanoholes formation using local droplet etching of fib-modified GaAs (001) surface

2022
In this work, we study of the effect of focused ion beam (FIB) and pre-growth treatment based on local droplet etching (LDE) techniques combination on the regular nanohole array formation on GaAs(001) surface, which can act as template for selective quantum dot formation in future.
Chernenko, Natalia   +5 more
openaire   +1 more source

Local Droplet Etching: Self-assembled Nanoholes for Quantum Dots and Nanopillars

2013
We review the mechanism and recent applications of the self-organized patterning of semiconductor surfaces by local droplet etching (LDE). LDE is a nanofabrication technique that is applicable in situ during molecular beam epitaxy (MBE) and fully compatible with state-of-the-art MBE systems.
Christian Heyn   +2 more
openaire   +1 more source

Full wafer property control of local droplet etched GaAs quantum dots

Journal of Crystal Growth, 2022
Hans-Georg Babin   +5 more
openaire   +1 more source

Excitonic states in GaAs quantum dots fabricated by local droplet etching

Physical Review B, 2014
A. Graf   +5 more
openaire   +1 more source

Local droplet etched quantum dots as quantum light sources

Sadhvikas Addamane   +9 more
openaire   +1 more source

Droplet etching with indium – Intermixing and lattice mismatch

Journal of Crystal Growth, 2019
Christian Heyn, W Hansen
exaly  

Role of Arsenic During Aluminum Droplet Etching of Nanoholes in AlGaAs.

Nanoscale Research Letters, 2016
Christian Heyn, Wolfgang Hansen
exaly  

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