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Electron–Matter Interactions During Electron Beam Nanopatterning

open access: yesAdvanced Functional Materials, EarlyView.
This article reviews the electron–matter interactions important to nanopatterning with electron beam lithography (EBL). Electron–matter interactions, including secondary electron generation routes, polymer radiolysis, and electron beam induced charging, are discussed.
Camila Faccini de Lima   +2 more
wiley   +1 more source

From In‐Silico Optimized Microfabrication to Experimental Validation: Engineering a Tridimensional Epi‐Intraneural Interface

open access: yesAdvanced Functional Materials, EarlyView.
An epi‐intraneural interface is developed through in silico optimization and a novel tridimensional microfabrication pipeline. The device integrates penetrating and epineural contacts on a flexible substrate. Mechanical, electrochemical, and in vivo testing in rat and pig reveal robust implantation, low‐threshold activation, and site‐dependent ...
Federico Ciotti   +14 more
wiley   +1 more source

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