Results 181 to 190 of about 88,788 (236)
Some of the next articles are maybe not open access.

MEMS Mirrors for LiDAR: A Review

Micromachines, 2020
Dingkang Wang, Huikai Xie
exaly  

MEMS GYROCOMPASS

2022
AALTONEN LASSE, BLOMQVIST ANSSI
openaire   +3 more sources

MEMS co-vibration combined hydrophone

Measurement: Journal of the International Measurement Confederation, 2023
Guojun Zhang   +2 more
exaly  

MEMS reliability

Microelectronics Reliability, 2003
openaire   +1 more source

A review of vibration-based MEMS piezoelectric energy harvesters

Energy Conversion and Management, 2011
Salem Saadon, Othman Sidek
exaly  

MEMS Mechanical Sensors

Sensor Review, 2004
S P Beeby
exaly  

Mems fabrication

International Test Conference, 2003. Proceedings. ITC 2003., 2004
openaire   +2 more sources

CMOS–MEMS resonators: From devices to applications

Microelectronic Engineering, 2015
Núria Barniol   +2 more
exaly  

MEMS RESONATOR

2020
JAAKKOLA ANTTI, KOPPINEN PANU
openaire   +3 more sources

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