Results 201 to 210 of about 88,788 (236)
Some of the next articles are maybe not open access.
Non-silicon MEMS platforms for gas sensors
Sensors and Actuators B: Chemical, 2016Leandro Lorenzelli +2 more
exaly
Integration design of a MEMS based fuze
Sensors and Actuators A: Physical, 2017Hanyue Liu, Tengjiang Hu
exaly
MEMS in metrology, metrology in MEMS
2007 IEEE Instrumentation & Measurement Technology Conference IMTC 2007, 2007openaire +1 more source

