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MEMS

2020
openaire   +1 more source

Method for manufacturing MEMS device and MEMS device

CHANG PING-HE, LAI KAHKEEN
openaire   +2 more sources

MEMS HEATER AND MEMS FLUID SENSOR

GHADERI MOHAMMADAMIR   +2 more
openaire   +1 more source

MEMS device and a MEMS device array

2011
openaire   +1 more source

Mem

2014
openaire   +1 more source

MEMS die and MEMS-based sensor

LOEPPERT PETER V   +2 more
openaire   +1 more source
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technology
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7. clean energy
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