Results 211 to 220 of about 88,788 (236)

MEMS device

2011
MI XIAOYU, TOYODA OSAMU, UEDA SATOSHI
openaire   +2 more sources

MEMS VALVE

2000
TAI YU-CHONG, YANG XING, GROSJEAN CHARLES   +2 more
openaire   +2 more sources

MEMS OSCILLATOR

2012
VERMEEREN PETRUS ANTONIUS THOMAS MARINUS, PHAN LE KIM   +1 more
openaire   +2 more sources

MEMS-CMOS-MEMS platform

2017
LLOYD STEPHEN, GURIN ILYA
openaire   +1 more source

MEMS AND MANUFACTURING METHOD OF MEMS

2011
UEKI SHINJI, IMAMOTO HIROSHI, HASHIGUCHI GEN, NISHIMORI YUKI, SUGIYAMA MASAKAZU   +4 more
openaire   +1 more source

Piezoelectric thin films and their applications in MEMS: A review

Journal of Applied Physics
Hua Tan, Haibo Zhang, Feng Chen
exaly  

MEMS MICROPHONE

2009
ALTMAN NATHAN, RAIF RAN, KEDEM NOAM
openaire   +3 more sources

Method for operating a mems system, and MEMS system

2020
SCHUSTER FLORIAN, GERING STEFAN, PETERSEN ANDREAS   +2 more
openaire   +2 more sources

MEMS resonators

2008
openaire   +2 more sources

MEMS ACTUATORS

2006
MENARD STEPHANE, LASSONDE NORMAND, VILLENEUVE JEAN-CLAUDE   +2 more
openaire   +2 more sources