Results 91 to 100 of about 193 (100)

Silicon MEMS Disk Resonator Gyroscope With an Integrated CMOS Analog Front-End

IEEE Sensors Journal, 2014
We present a 2-mm diameter, 35-μm-thick disk resonator gyro (DRG) fabricated in silicon with integrated 0.35-μm CMOS analog front-end circuits. The device is fabricated in the commercial InvenSense Fabrication MEMSCMOS integrated platform, which incorporates a wafer-level vacuum seal, yielding a quality factor (Q) of 2800 at the DRGs 78-kHz resonant ...
Tsanh-Hung Su, Sarah H. Nitzan, Parsa Taheri-Tehrani, Mitchell H. Kline, Bernhard E. Boser, David A. Horsley   +5 more
openaire   +1 more source

Decaying Time Constant Enhanced MEMS Disk Resonator for High Precision Gyroscopic Application

IEEE/ASME Transactions on Mechatronics, 2018
This paper reports a new design strategy of adding lumped masses to the frame structure of a disk resonator gyroscope (DRG) to mitigate its figure of merit (FOM). A greatly enhanced decaying time constant τ can lead to very small FOM, which could then greatly mitigate the DRG's bias and bias drift.
Xin Zhou, Dingbang Xiao, Qingsong Li, Zhanqiang Hou, Kaixuan He, Zhihua Chen, Yulie Wu, Xuezhong Wu   +7 more
openaire   +1 more source

A Rate-Integrating Honeycomb Disk Resonator Gyroscope With 0.038°/h Bias Instability and °7000°/s Measurement Range

IEEE Electron Device Letters, 2021
Yongmeng Zhang, Jiangkun Sun, Yi Xu
exaly  

A Quality Factor Matching Method for MEMS Disk Resonator Gyroscope in Rate Mode

2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Jingbo Ren, Tong Zhou, Yi Zhou, Yixuan Li, Yan Su   +4 more
openaire   +1 more source

High Accuracy MEMS Gyrocompass with Honeycomb Disk Resonator Gyroscope

Quanzhu Meng, Shuiyang Liang, Qinsong Li, Tongqiao Miao, Dingbang Xiao, Xuezhong Wu   +5 more
openaire   +1 more source

High-Precision MEMS North-Finding System in the Whole Temperature Range with Honeycomb Disk Resonator Gyroscope

2024 DGON Inertial Sensors and Applications (ISA)
Shuiyang Liang, Quanzhu Meng, Tongqiao Miao, Qingsong Li, Jiangkun Sun, Dingbang Xiao, Xuezhong Wu   +6 more
openaire   +1 more source

Multifrequency Modulation Techniques to Suppress Coupling Between Excitation and Sense Electrodes in MEMS Disk Resonant Gyroscopes

IEEE Transactions on Instrumentation and Measurement
Zhaorong Ke, Yi Zhou, Yixuan Li, Pu Chen, Shenhu Huang, Zhenjun Wang, Bo Jiang, Tong Zhou, Yan Su   +8 more
openaire   +1 more source

An Interface ASIC for MEMS Disk Resonator Gyroscope With 0.018°/h Bias Instability and 108 ppm Scale Factor Nonlinearity

IEEE Transactions on Circuits and Systems I: Regular Papers
Wenbo Zhang, Xin Yu, Yihang Wang, Haifeng Zhang, Xuejun Sha, Xiaowei Liu, Liang Yin, Qiang Fu, Xiangyu Li 0011   +8 more
openaire   +1 more source

Research on Closed-Loop Control Method of MEMS Disk Resonant Gyroscope Based on Dual-Modal Parametric Excitation

2024 IEEE 7th Information Technology, Networking, Electronic and Automation Control Conference (ITNEC)
Yichen Di, Hao Tang, Yi Zhou, Zhuolin Yu, Tong Zhou, Yan Su   +5 more
openaire   +1 more source

Design of a Disk Resonator Gyroscope With High Mechanical Sensitivity by Optimizing the Ring Thickness Distribution

Journal of Microelectromechanical Systems, 2016
Dingbang Xiao, Ｘin Zhou, Qingsong Li   +2 more
exaly