Results 81 to 90 of about 193 (100)
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An In-Run Automatic Mode-Matching Method for N = 3 MEMS Disk Resonator Gyroscope

IEEE Sensors Journal, 2021
This paper demonstrates an in-run automatic mode-matching method for a Micro-Electro-Mechanical systems (MEMS) disk resonator gyroscope (DRG) operating in the n=3 wineglass mode. In proposed method, two sideband signals whose frequencies are located at both sides of the drive mode symmetrically, are used to excite the gyroscope, and the response of the
Yi Zhou, Jingbo Ren, Mengxiang Liu
exaly   +2 more sources

A Configurable Measurement Range and Bandwidth Mems Disk Resonator Gyroscope

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), 2021
This paper reports a closed-loop MEMS disk resonator gyroscope (DRG) with configurable measurement range and bandwidth. A configurable ASIC is employed for the measurement range and bandwidth configuration and the design methods of measurement range and bandwidth are studied.
Hao Wang   +2 more
exaly   +2 more sources

A Wafer-Level Vacuum Packaged MEMS Disk Resonator Gyroscope With 0.42°/h Bias Instability Within ±300°/s Full Scale

IEEE Transactions on Industrial Electronics, 2022
This paper reports a MEMS disk resonator gyroscope (DRG) with superior overall performance in terms of bias instability, measurement range, and size. Specifically, a fully filled electrodes MEMS DRG is proposed to improve sensing capacitance to 23.66 pF and drive capacitance to 6.14 pF.
Hao Wang, Haiyang Quan, Jianbing Xie
exaly   +2 more sources

Vibrational Energy Loss Analysis of a MEMS Disk Resonator Gyroscope

2018 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), 2018
In this paper, we design and fabricated a low vibrational energy loss MEMS Disk Resonator Gyroscope. For the conventional turning fork micromachined gyroscope, the anchor loss is the primary form of energy loss, but for the MEMS Disk Resonator Gyroscope, the anchor loss can be ignored because of its center supported structure.
Jianbing Xie, Jin Yang
exaly   +2 more sources

The Frequency Avoid-Crossing Effect Induced by the Hybrid Modal Coupling in a Disk MEMS Resonator Gyroscope

2023 IEEE 18th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2023
Qingsong Li, Dingbang Xiao
exaly   +2 more sources

Autonomous calibration of MEMS disk resonating gyroscope for improved sensor performance

2016 American Control Conference (ACC), 2016
This work describes a new method for autonomous mode-matching and quadrature nulling of a Microelectromechanical system (MEMS) wineglass mode gyroscope, utilizing particle swarm optimization. Use of this derivative-free optimization scheme allows for multi-objective optimization of gyroscopic performance parameters.
Ian B. Flader   +7 more
openaire   +1 more source

Research on Quadrature Suppression Method of Large Stiffness MEMS Disk Resonator Gyroscope Based on Axial Reconfiguration

2023 IEEE 16th International Conference on Electronic Measurement & Instruments (ICEMI), 2023
Hao Tang, Yi Zhou, Tong Zhou
exaly   +2 more sources

An Anti-Aliasing and Self-Clocking ΣΔM Cobweb-Like Disk Resonant MEMS Gyroscope with Extended Input Range

2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 2021
This paper presents a novel anti-aliasing and self-clocking MASH-like electro-mechanical sigma-delta (ΣΔ) modulated MEMS disk resonant gyroscope with multi-bit force-balancing operation. The proposed technique allows extending the input signal range of a ΣΔM disk gyroscope beyond the limit imposed by single-bit stream operation.
Fang Chen   +4 more
openaire   +1 more source

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