Machine learning-driven discovery of high-performance MEMS disk resonator gyroscope structural topologies [PDF]
Microsystems & NanoengineeringThe design of the microelectromechanical system (MEMS) disc resonator gyroscope (DRG) structural topology is crucial for its physical properties and performance.
Chen Chen +7 more
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0.04 degree-per-hour MEMS disk resonator gyroscope with high-quality factor (510 k) and long decaying time constant (74.9 s). [PDF]
Microsyst Nanoeng, 2018 Abstract The disk resonator gyroscope is an attractive candidate for high-performance MEMS gyroscopes. This gyroscope consists of a sensor and readout electronics, and the characteristics of the sensor directly determine the performance.
Li Q +8 more
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Analysis of Parametric and Subharmonic Excitation in Push-Pull Driven Disk Resonator Gyroscopes [PDF]
Micromachines, 2021 For micro-electromechanical system (MEMS) resonators, once the devices are fabricated and packaged, their intrinsic quality factors (Q) will be fixed and cannot be changed, which seriously limits the further improvement of the resonator’s performance. In
Kai Wu +7 more
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Automatic Mode-Matching Method for MEMS Gyroscope Based on Fast Mode Reversal [PDF]
MicromachinesProcessing errors can result in an asymmetric stiffness distribution within a microelectromechanical system (MEMS) disk resonator gyroscope (DRG) and thereby cause a mode mismatch and reduce the mechanical sensitivity and closed-loop scale factor ...
Feng Bu +4 more
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0.003°/h bias instability of honeycomb disk resonator gyroscope achieved by mode reversal combined mode deflection control method [PDF]
Microsystems & NanoengineeringMicroelectromechanical systems (MEMS) gyroscopes with higher precision have always been a focal point of research. Due to limitations in resonant structure, fabrication processes, and measurement and control techniques, MEMS gyroscopes with bias ...
Liangqian Chen +7 more
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An automatic Q-factor matching method for eliminating 77% of the ZRO of a MEMS vibratory gyroscope in rate mode [PDF]
Microsystems & NanoengineeringMismatching quality factors (Q-factors) is one of the main factors causing zero-rate output (ZRO) in degenerate (DE) Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes.
Jingbo Ren +4 more
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MEMS disk resonator gyroscope with integrated analog front-end
2013 IEEE SENSORS, 2013 We present a 2 mm diameter, 35 μm thick disk resonator gyro (DRG) fabricated in silicon with integrated 0.35 μm CMOS analog front-end circuits in the Invensense NF process. This process incorporates a wafer-level vacuum seal, yielding a quality factor (Q) of 2800 at the DRG's 78 kHz resonance frequency. After performing electrostatic tuning to enable
T.-H. Su +5 more
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Recent Advances in Artificial Intelligence Sensors
Advanced Sensor Research, Volume 2, Issue 8, August 2023., 2023 Significant growth in the development of artificial intelligence (AI) is being witnessed. Advanced AI sensors can detect multidimensional information and human‐brain‐like computation device for data processing. This review introduces the trend of advanced AI sensors for both edge computing and cloud computing, which will show great potential in the ...
Zixuan Zhang, Luwei Wang, Chengkuo Lee
wiley +1 more source
Small, Volume 18, Issue 35, September 1, 2022., 2022 Herein a light‐driven micromechanical oscillator on optical fiber tip is developed, which can be operated by a low optical power (in the mW or even the µW range), can produce large mechanical displacements (>5–100 µm), and can be designed to operate at frequencies from sub‐kHz up to more than 200 kHz.
Simon Pevec, Denis Donlagic
wiley +1 more source
Virus Detection: From State‐of‐the‐Art Laboratories to Smartphone‐Based Point‐of‐Care Testing
Advanced Science, Volume 9, Issue 17, June 13, 2022., 2022 This review summarizes the latest development of virus detection techniques, with the special focus on smartphone‐based viral diagnostics whose advances have enabled laboratory‐based molecular detections to be performed with plug‐and‐play stand‐alone devices.
Meng Xiao +7 more
wiley +1 more source