Identifikasi Gugus SiHx (x=1, 2 dan 3) pada Silikon Berpori dari Substrat Si (111) Tipe-P
Jurnal Fisika Flux, 2017 The study of identification of functional group SiHx (x=1, 2, 3) to typep Si (111) made by anodizatied silicon wafer in 0,3 ohm-cm hydrofluoric (HF) has been conducted.
I Nyoman Sudiana
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